Characterization of Sputtered Coatings with Various Nitrogen Content Deposited from High Aluminum Alloyed TiAlV Target

Abstract

In this study, a Ti 50 Al 40 V 10 single alloying target is used to deposit TiAlVN coatings by a direct current (dc) magnetron sputtering technique. The structural, mechanical, and frictional properties of final coatings deposited at a various N 2 content are investigated. It reveals that TiAlVN coating transforms from a single-phase (cubic phase) to a dual-phase structure (cubic and hexagonal phases) with the increase of N 2 content. The highest hardness (³36.5 GPa) and elastic modulus (³372 GPa), and a good adhesion strength (³24.4 N) are achieved in the sample deposited with a N 2 flow rate of 6 sccm, which are determined by the nano-indentation and scratch test measurements. In addition, TiAlVN coating deposited with a N 2 flow rate of 3 sccm has the lowest friction coefficient in the dry and oily conditions.

Impact of reactive nitrogen flow on morphology, mechanical properties, and biocorrosion behavior of sputtered TiN coatings towards orthopedic applications

“…Thus, the highest hardness value of 24.8 ± 1.8 GPa was achieved with the optimal reactive N 2 flow of 25 sccm. As we have known, the hardness of the coatings depends not only on the formation of fine grains but also on the growth of TiN (111) crystallographic orientation, density, and other factors [25,26]. The increase in hardness is attributed directly ratio to the peak intensity of TiN (111) plane orientation and smaller grain size according to the Hall-Petch effect [27].…”