Characterization of the evaporation behavior of a β-SiC target during electron beam-physical vapor deposition

Jiao, Yi; He, Xiaodong; Sun, Yun

doi:10.1016/j.jallcom.2009.10.218

Cited by 11 publications

(6 citation statements)

References 21 publications

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“…Obviously, the Si component of SiC undergoes reduction to the elemental state. Besides, bands at 1359 and 1591 cm 1 attributed to carbon become overlapped to some extent and the full width at half maximum (FWHM) gets a bit wider than that before laser treatment, maybe because of the appearance of new crystal phase for carbon, as Yi et al [31] have reported that some SiC are decomposed after electron beam evaporation and generates a quantity of diamond-like carbon phase. It can be concluded that the laser irradiation has caused the decomposition of SiC, generating the elemental Si and C. Furthermore, it can also be observed that after laser treatment, the Raman intensity of the band at 964 cm 1 respect to 788 cm 8(c); however, large quantity of Si ( Fig.…”

Section: 2 Laser-ablated Surface Of Sicmentioning

confidence: 99%

Investigation on the laser ablation of SiC ceramics using micro‐Raman mapping technique

Yang

Huang

et al. 2016

J Adv Ceram

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Abstract:Research on the laser ablation behavior of SiC ceramics has great significance for the improvement of their anti-laser ability as high-performance mirrors in space and lasers, or the laser surface micro-machining technology as electronic components in micro-electron mechanical systems (MEMS). In this work, the laser ablation of SiC ceramics has been performed by using laser pulses of 12 ns duration at 1064 nm. The laser induced damage threshold (LIDT) below 0.1 J/cm 2 was obtained by 1-on-1 mode and its damage morphology appeared in the form of "burning crater" with a clear boundary. Micro-Raman mapping technique was first introduced in our study on the laser ablation mechanisms of SiC surface by identifying physical and chemical changes between uninjured and laser-ablated areas. It has been concluded that during the ablation process, SiC surface mainly underwent decomposition to the elemental Si and C, accompanied by some transformation of crystal orientation. The oxidation of SiC also took place but only in small amount on the edges of target region, while there was no hint of SiO 2 in the center with higher energy density, maybe because of deficiency of O 2 atmosphere in the ablated area, elimination of SiO 2 by carbon at 1505 ℃, or evaporating at 2230 ℃.

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Section: 2 Laser-ablated Surface Of Sicmentioning

confidence: 99%

Investigation on the laser ablation of SiC ceramics using micro‐Raman mapping technique

Yang

Huang

et al. 2016

J Adv Ceram

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“…According to mechanical properties of graphite, the strength and hardness are not enough to endure the irradiation environment in fusion reactor. SiC coating is considered as an ideal protective method in several industrial sectors because of the physical, chemical and mechanical properties, high thermal conductivity and enough strength to endure the neutron irradiation on fusion reactor [2][3][4] . It is a important reason that its characteristics of high melting temperature, high oxidation resistance at high temperature and relatively low thermal coefficient of expansion.…”

Section: Introductionmentioning

confidence: 99%

THE EFFECTS ON HEAT TREATMENT OF SIC COATED / GRAPHITE PLATE BY RF SPUTTERING SYSTEM

Moon

Yoon

Murakami

et al. 2012

Int. J. Mod. Phys. Conf. Ser.

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Silicon carbide film was coated by RF sputtering system onto graphite plate substrate. Surface roughness of substrate was polished by wet polishing with sand paper, number of 3000. RF power was 200 W in 0.4 Pa of argon gas. Deposition holding time was 3hours in 600 °C temperature. Specimens were heat treated by 1200, 1400 and 1500 °C for 1 hour to research the effect of heat treatment on SiC coating layer. Atomic Force Microscope (AFM) was used to characterize the surface morphology and the Sq surface roughness. AFM was used to investigate the grain size and roughness of the surface of thin coating film. X-ray diffraction (XRD) was used for detecting the coated SiC thin film by thin film mode. FE-SEM was used to characterize the microstructure of SiC coating film.

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“…Siliconcarbide (SiC) coating on the graphite pebble is adopted to prohibit the reaction of graphite with steam and/or air and to increase the intrinsic properties such as high hardness, thermal conductivity, thermal stability and reduced activation. There are many methods to deposit SiC such as using electron beam [9], chemical vapor deposition (CVD) system [10], pulsed laser ablation [11]. Among these, two types of CVD coating methods are adopted for SiC coating on the graphite pebble.…”

Section: Introductionmentioning

confidence: 99%

R&D progress of Korean HCSB TBM

Cho

Ahn

et al. 2012

Fusion Engineering and Design

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Characterization of the evaporation behavior of a β-SiC target during electron beam-physical vapor deposition

Cited by 11 publications

References 21 publications

Investigation on the laser ablation of SiC ceramics using micro‐Raman mapping technique

Investigation on the laser ablation of SiC ceramics using micro‐Raman mapping technique

THE EFFECTS ON HEAT TREATMENT OF SIC COATED / GRAPHITE PLATE BY RF SPUTTERING SYSTEM

R&D progress of Korean HCSB TBM

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