Characterization of the Piezoresistive Effects of Silicon Nanowires

Jang, Seohyeong; Sung, Jinwoo; Chang, Bobaro; Kim, Taeyup; Ko, Hyoungho; Koo, Kyo‐in; Cho, Dong‐il Dan

doi:10.3390/s18103304

Cited by 11 publications

(4 citation statements)

References 34 publications

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“…In their work, a GF of 47 was found in the annealed SiNWs, indicating their potential in NEMS. Jang et al developed a theoretical model based on stress concentration effects and piezo pinch effects (stress-induced change of surface charge) to characterize the piezoresistive effects of SiNWs [98]. Based on the biasing of the SiNW, it is classified into two types: (i) ungated SiNW and (ii) gated SiNW.…”

Section: Sinw As a Piezoresistormentioning

confidence: 99%

Silicon nanowire piezoresistor and its applications: a review

Raman,

K V,

et al. 2024

Nanotechnology

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Monocrystalline bulk silicon with doped impurities has been the widely preferred piezoresistive material for the last few decades to realize micro-electromechanical system (MEMS) sensors. However, there has been a growing interest among researchers in the recent past to explore other piezoresistive materials with varied advantages in order to realize ultra-miniature high-sensitivity sensors for area-constrained applications. Of the various alternative piezoresistive materials, silicon nanowires (SiNWs) are an attractive choice due to their benefits of nanometre range dimensions, giant piezoresistive coefficients, and compatibility with the integrated circuit (IC) fabrication processes. This review article elucidates the fundamentals of piezoresistance and its existence in various materials, including silicon. It comprehends the piezoresistance effect in SiNWs based on two different biasing techniques, viz., (i) ungated and (ii) gated SiNWs. In addition, it presents the application of piezoresistive SiNWs in MEMS-based pressure sensors, acceleration sensors, flow sensors, resonators, and strain gauges.

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Section: Sinw As a Piezoresistormentioning

confidence: 99%

Silicon nanowire piezoresistor and its applications: a review

Raman,

K V,

et al. 2024

Nanotechnology

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“…Since then, several research works have reported the methods for characterizing and exploiting this phenomenon of SiNW [265,266]. Recently, a new model to understand the piezoresistive effects in SiNW has been developed by Jang et al [267]. Piezoresistive sensors are part of many micro-electro-mechanical systems (MEMS) and nanoelectromechanical systems (NEMS) devices which are used by pressure sensors, accelerometers, tactile sensors, and flow sensors etc.…”

Section: Sinw Piezoresistive Sensorsmentioning

confidence: 99%

Advances in silicon nanowire applications in energy generation, storage, sensing, and electronics: a review

2023

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Nanowire-based technological advancements thrive in various fields, including energy generation and storage, sensors, and electronics. Among the identified nanowires, silicon nanowires (SiNWs) attract much attention as they possess unique features, including high surface-to-volume ratio, high electron mobility, bio-compatibility, anti-reflection, and elasticity. They were tested in domains of energy generation (thermoelectric, photo-voltaic, photoelectrochemical), storage (lithium-ion battery (LIB) anodes, super capacitors), and sensing (bio-molecules, gas, light, etc.). These nano-structures improved the system's performance in terms of efficiency, stability, sensitivity, selectivity, cost, rapidity, and reliability. This review article scans and summarizes the significant developments that occurred in the last decade concerning the application of SiNWs in the fields of thermoelectric, photovoltaic, and photoelectrochemical power generation, storage of energy using LIB anodes, biosensing, and disease diagnostics, gas and pH sensing, photodetection, physical sensing, and electronics. The functionalization of SiNWs with various nanomaterials and the formation of heterostructures for achieving improved characteristics are discussed. This article will enlighten all researchers in the field of nanotechnology about various possible applications and improvements that can be realized using SiNW.

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“…This innovative panel combines the features of both TENGs and piezoresistive effects. [ 65 ] It uses piezoresistive mapping for pressure detection, [ 66 ] while also leveraging the high precision of TENGs to create a nine‐grid touch panel for robotic control, offering a novel solution to the sensitivity issue typically associated with resistive touch panels.…”

Section: Principles and Applications Of Flexible Touch Panelsmentioning

confidence: 99%

Integration of Flexible Touch Panels and Machine Learning: Applications and Techniques

Zheng,

Chen,

et al. 2023

Advanced Intelligent Systems

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The rapid advancement of mobile devices and human–machine interaction technologies has ushered in a new era for flexible touch panels as a novel input interface. This article reviews the historical evolution and technical progress of flexible touch panel technologies, from rudimentary single‐point touch to sophisticated grid‐free touch systems. Additionally, the working principles and mechanisms that underpin these advanced systems, including capacitive, resistive, piezoelectric, and triboelectric nanogenerator technologies, are explored. Following this, the integration of machine learning methods into these panels is discussed, offering new avenues for enhancing user experience and expanding functional capabilities. Various machine learning algorithms such as support vector machines, artificial neural networks, convolutional neural networks, and k‐nearest neighbors are examined for their potential applications in touch panel technologies. Finally, the challenges and prospects for the application of flexible touch panels fused with machine learning are discussed.

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Characterization of the Piezoresistive Effects of Silicon Nanowires

Cited by 11 publications

References 34 publications

Silicon nanowire piezoresistor and its applications: a review

Silicon nanowire piezoresistor and its applications: a review

Advances in silicon nanowire applications in energy generation, storage, sensing, and electronics: a review

Integration of Flexible Touch Panels and Machine Learning: Applications and Techniques

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