Characterization of titanium nitride thin films

Wu, Heng; Chou, Tse‐Chuan; Mishra, Anoop Kumar; Anderson, D.R.; Lampert, Jordan; Gujrathi, S. C.

doi:10.1016/0040-6090(90)90274-h

Cited by 110 publications

(38 citation statements)

References 9 publications

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“…It can be visually observed a golden color as the sample is heated at 300 1C for 1800 s in ambient air. The result is in agreement with Wu et al [20] who studied the TiN thin films heated at 300, 400 and 550 1C in air and N 2 atmosphere. Initial oxidation of 850-TiN coating with a partial color change occurs at 350 1C, while the remarkable oxidation of 850-TiN coating occurring between 400 1C and 450 1C.…”

Section: Methodssupporting

confidence: 94%

Oxidation behavior of CVD star-shaped TiN coating in ambient air

Tang

Wang

Zhu

et al. 2015

Ceramics International

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Section: Methodssupporting

confidence: 94%

Oxidation behavior of CVD star-shaped TiN coating in ambient air

Tang

Wang

Zhu

et al. 2015

Ceramics International

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“…Two peaks were observed in the spectrum around 396 eV and 400 eV. Several research groups investigated the N 1 s peak in XPS spectra during the oxidation of TiN, and assigned the peaks as atomic b-N (396 eV) and molecularly chemisorbed g-N 2 (400 and 402 eV) [18][19][20][21]. Based on these reports, Asahi et al described that the peak at 396 eV corresponds to N atoms in Ti-N bonds, while the peak around 400 eV corresponds to N 2 molecules incorporated into the TiO 2 lattice [12].…”

Section: Resultsmentioning

confidence: 99%

Nitrogen-doped titanium dioxide photocatalysts for visible response prepared by using organic compounds

Nosaka

Matsushita

Nishino

et al. 2005

Science and Technology of Advanced Materials

294

178

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In order to utilize visible light in photocatalytic reactions, nitrogen atoms were doped in commercially available photocatalytic TiO 2 powders by using an organic compound such as urea and guanidine. Analysis by X-ray photoelectron spectroscopy (XPS) indicated that N atoms were incorporated into two different sites of the bulk phase of TiO 2 . A significant shift of the absorption edge to a lower energy and a higher absorption in the visible light region were observed. These N-doped TiO 2 powders exhibited photocatalytic activity for the decomposition of 2-propanol in aqueous solution under visible light irradiation. The photocatalytic activity increased with the decrease of doped N atoms in O site, while decreased with decrease of the other sites. Degradation of photocatalytic activity based on the release of nitrogen atoms was observed for the reaction in the aqueous suspension system. q

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“…The low nitridation in the films may be due to high surface oxidation. The source of oxidation may be the nitrogen gas, the commercial nitrogen gas used here might have contained considerable percentage of oxygen impurities [25]. The Ar 2p peak identified in the spectra of the etched surface may be from the adsorbed argon during substrate etching or Ar species incorporated into the films during growth [26].…”

Section: Xps Analysismentioning

confidence: 99%

RETRACTED ARTICLE: Structural and electrochemical impedance spectroscopic studies on reactive magnetron sputtered titanium oxynitride (TiON) thin films

Padmavathy¹,

Subramanian

Ravidhas³

et al. 2011

J Appl Electrochem

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Titanium oxynitride films were deposited onto commercially pure titanium substrates by direct current reactive magnetron sputtering method using Ti targets and an Ar-N 2 -O 2 mixture discharge gas. The X-ray photoelectron spectroscopy survey spectra on the etched surfaces of TiON films exhibited the characteristic Ti 2p, N 1s, and O 1s peaks at the corresponding binding energies 454.5, 397.0, and 530.7 eV, respectively. The surface topography of these coatings was studied using atomic force microscopy. The characteristic Raman peaks at 200 and 641 cm -1 for the TiN bonds and at 148, 398 ,and 518 cm -1 for the TiO 2 bonds were observed from the Laser Raman spectrometer. The potentiodynamic polarization studies in simulated bodily fluid were performed and the results are reported in this article.

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Characterization of titanium nitride thin films

Cited by 110 publications

References 9 publications

Oxidation behavior of CVD star-shaped TiN coating in ambient air

Oxidation behavior of CVD star-shaped TiN coating in ambient air

Nitrogen-doped titanium dioxide photocatalysts for visible response prepared by using organic compounds

RETRACTED ARTICLE: Structural and electrochemical impedance spectroscopic studies on reactive magnetron sputtered titanium oxynitride (TiON) thin films

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