Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates

Henry, Bernard M.; Erlat, Ahmet Gün; McGuigan, Alison P.; Grovenor, C.R.M.; Briggs, G. A. D.; Tsukahara, Yusuke; Miyamoto, Takashi; Noguchi, Nobuaki; T, Niijima

doi:10.1016/s0040-6090(00)01769-7

Cited by 127 publications

(64 citation statements)

References 9 publications

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“…The fragmentation test proved its relevance in the case of a variety of thin brittle films on ductile metal [197,199,[246][247][248][249][250] and polymer substrates [10,137,[251][252][253][254][255], particularly PET [78,105,125,163,164,187,[256][257][258][259][260][261][262][263][264][265][266]. In this technique, the evolution of crack patterns in the brittle coating is monitored as a function of the tensile load applied to the substrate.…”

Section: Adhesion Measurements Of Thin Oxide Films On Polymer Substratesmentioning

confidence: 99%

Durability of nanosized oxygen-barrier coatings on polymers

Leterrier

2003

Progress in Materials Science

472

341

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Research on silicon oxide thin films developed as gas-barrier protection for polymer-based components is reviewed, with attention paid to the relations between (i) coating defects, cohesive strength and internal stress state, and (ii) interfacial interactions and related adhesion to the substrate. The deposition process of the oxide from a vapor or a plasma phase leads in both cases to the formation of covalent bonds between the two materials, with high adhesion levels. The oxide coating contains nanoscopic defects and microscopic flaws, and their respective effect on the barrier performance and mechanical resistance of the coating is analyzed. Potential improvements are discussed, including the control of internal stresses in the coating during deposition. Controlled levels of compressive internal stresses in the coating are beneficial to both the barrier performance and the mechanical reliability of the coated polymer. An optimal coating thickness, with low oxygen permeation and high cohesive strength, is determined from experimental and theoretical analyses of the failure mechanisms of the coating under mechanical load. These investigations are found relevant to tailor the interactions and stress state in the interfacial region, in order to improve the reliability of the coating/substrate assembly. #

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Section: Adhesion Measurements Of Thin Oxide Films On Polymer Substratesmentioning

confidence: 99%

Durability of nanosized oxygen-barrier coatings on polymers

Leterrier

2003

Progress in Materials Science

472

341

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“…However, the main challenges of ECG thin films are mainly concerning the massive production and characterization in nanoscale. Several thin film techniques have been reported to fabricate ECG thin films, such as pulsed laser deposition (PLD), sputtering, chemical vapor deposition (CVD), atomic layer deposition (ALD), laser ablation and sol-gel process [21][22][23][24][25]. Among these fabrication methods, PLD and sputtering with dual-beam have been proposed as useful techniques due to their capability to synthesize high-quality thin films.…”

Section: Introductionmentioning

confidence: 99%

On the Novel Biaxial Strain Relaxation Mechanism in Epitaxial Composition Graded La1−xSrxMnO3 Thin Film Synthesized by RF Magnetron Sputtering

2015

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Abstract:We report on a novel method to fabricate composition gradient, epitaxial La1−xSrxMnO3 thin films with the objective to alleviate biaxial film strain. In this work, epitaxial, composition gradient La1−xSrxMnO3, and pure LaMnO3 and La0.67Sr0.33MnO3 thin films were deposited by radio frequency (RF) magnetron sputtering. The crystalline and epitaxy of all films were first studied by symmetric θ-2θ X-ray diffraction (XRD) and low angle XRD experiments. Detailed microstructural characterization across the film thickness was conducted by high-resolution transmission electron microscopy and electron diffraction. Four compositional gradient domains were observed in the La1−xSrxMnO3 film ranging from LaMnO3 rich to La0.67Sr0.33MnO3 at the surface. A continuous reduction in the lattice parameter was observed accompanied by a significant reduction in the out-of-plane strain in the film. Fabrication of the composition gradient La1−xSrxMnO3 thin film was found to be a powerful method to relieve biaxial strain under critical thickness. Besides, the coexistence of domains with a composition variance is opening up various new possibilities of designing new nanoscale structures with unusual cross coupled properties.

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“…Inorganic thin films based on SiO 2 and SiN are frequently used as permeation protective coatings for microelectronic and microfluidic devices due to their bio-inert behavior, missing cytotoxicity and high barrier effect [6][7][8][9][10][11]. Other well-known vacuum coating materials, deposited by physical and chemical vapor deposition (PVD, CVD) are platinum, gold, titanium oxide and other ceramics like aluminum oxide and oxynitride [12][13][14]. Further improvements in gas barrier are provided by multilayered film structures based on inorganic and organic layers [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Gas Permeation, Mechanical Behavior and Cytocompatibility of Ultrathin Pure and Doped Diamond-Like Carbon and Silicon Oxide Films

et al. 2013

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Protective ultra-thin barrier films gather increasing economic interest for controlling permeation and diffusion from the biological surrounding in implanted sensor and electronic devices in future medicine. Thus, the aim of this work was a benchmarking OPEN ACCESSCoatings 2013, 3 269 of the mechanical oxygen permeation barrier, cytocompatibility, and microbiological properties of inorganic ~25 nm thin films, deposited by vacuum deposition techniques on 50 µm thin polyetheretherketone (PEEK) foils. Plasma-activated chemical vapor deposition (direct deposition from an ion source) was applied to deposit pure and nitrogen doped diamond-like carbon films, while physical vapor deposition (magnetron sputtering in pulsed DC mode) was used for the formation of silicon as well as titanium doped diamond-like carbon films. Silicon oxide films were deposited by radio frequency magnetron sputtering. The results indicate a strong influence of nanoporosity on the oxygen transmission rate for all coating types, while the low content of microporosity (particulates, etc.) is shown to be of lesser importance. Due to the low thickness of the foil substrates, being easily bent, the toughness as a measure of tendency to film fracture together with the elasticity index of the thin films influence the oxygen barrier. All investigated coatings are non-pyrogenic, cause no cytotoxic effects and do not influence bacterial growth.

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Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates

Cited by 127 publications

References 9 publications

Durability of nanosized oxygen-barrier coatings on polymers

Durability of nanosized oxygen-barrier coatings on polymers

On the Novel Biaxial Strain Relaxation Mechanism in Epitaxial Composition Graded La1−xSrxMnO3 Thin Film Synthesized by RF Magnetron Sputtering

Gas Permeation, Mechanical Behavior and Cytocompatibility of Ultrathin Pure and Doped Diamond-Like Carbon and Silicon Oxide Films

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