Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System

Abstract

In this work, we present the results of the opto–electro–mechanical characterization of tunable micro-lenses, Tlens®, performed with a single-spot optical measuring system. Tested devices are composed of a transparent soft polymer layer that is deposited on a supporting glass substrate and is covered by a glass membrane with a thin-film piezoelectric actuator on top. Near-infrared optical low-coherence reflectometry is exploited for both static and low-frequency dynamic analyses in the time domain. Optical thickness of the layers and of the overall structure, actuation efficiency, and hysteretic behavior of the piezo-actuator as a function of driving voltage are obtained by processing the back-reflected signal in different ways. The use of optical sources with relatively short coherence lengths allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces, furthermore, selecting the plane/layer to be monitored. We finally report results of direct measurements of Tlens® optical power as a function of driving voltage, performed by redirecting a He-Ne laser beam on the lens and monitoring the focused spot at various distances with a digital camera.

Development and Research Application of Optical Waveguide Microstructure Component Manufacturing Process for Triangle Roller Imprinting

“…The technology of the microsystem component manufacturing process is usually used in advanced scientific technology industries such as microsystems, opto-mechatronics, biomedicine, display monitors, opto-electrics, optics, and information communication. Microsystem components are usually used as the key to enhancing product efficacy and bringing scientific products into reality, for example, in the array grating, phased-array lens, diffusion membrane, and light guide plate of the backlighting modules of LCD monitors; the microchannel structure used for examining diabetes or cancers in biomedical engineering [1][2][3]; and the micro-lens structure [4][5][6][7][8][9][10][11][12] for capturing images in the 3C industry. Optical waveguide components have been applied in microsystems to transmit optical signals.…”

Lorentz Force Actuated Tunable-Focus Liquid Lens

“…Not having a moving lens barrel found in most of traditional imaging devices results in a faster response time, a more compact package, and a robust device structure [1]. To realize focus tunability, various mechanisms, for example, liquid crystal [2,3,4], polymer [5,6,7], and most frequently, liquid-filled focus tunable lenses [1], have been proposed and used.…”