2013
DOI: 10.1016/j.elstat.2013.09.002
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Characterization techniques for a MEMS electric-field sensor in vacuum

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Cited by 5 publications
(2 citation statements)
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“…High-quality electric- and magnetic-field sensors are readily available, either in research form (Heintzelman, 2015) or as commercial products (NARDA Safety Test Solutions, 2020; Quasar Federal Systems, 2017). Facilities for calibrating and characterizing them have also been constructed (Ghionea et al, 2013; Heintzelman and Hull, 2015; Hull et al, 2006). The relationship between the voltages and currents on the lines and the electric and magnetic fields around them is linear, so the latter can be used to estimate the former.…”
Section: Introductionmentioning
confidence: 99%
“…High-quality electric- and magnetic-field sensors are readily available, either in research form (Heintzelman, 2015) or as commercial products (NARDA Safety Test Solutions, 2020; Quasar Federal Systems, 2017). Facilities for calibrating and characterizing them have also been constructed (Ghionea et al, 2013; Heintzelman and Hull, 2015; Hull et al, 2006). The relationship between the voltages and currents on the lines and the electric and magnetic fields around them is linear, so the latter can be used to estimate the former.…”
Section: Introductionmentioning
confidence: 99%
“…The time-varying induced charge on the electrode is then converted into a voltage signal. This method has been miniaturized to profit from reduced power consumption and size [14][15][16]. The grounded component, however, causes massive field distortions directly at the measurement point.…”
mentioning
confidence: 99%