2009
DOI: 10.1063/1.3153972
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Characterizations of strip-line microwave micro atmospheric plasma and its application to neutralization

Abstract: A microwave-induced plasma source: Characterization and application for the fast deposition of crystalline silicon films Characterization of the behavior of chemically reactive species in a nonequilibrium inductively coupled argonhydrogen thermal plasma under pulse-modulated operation Characteristics of an atmospheric microwave-induced plasma generated in ambient air by an argon discharge excited in an open-ended dielectric discharge tubeIn this work, we estimate the plasma parameters of strip-line microwave m… Show more

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Cited by 10 publications
(3 citation statements)
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“…This technique has also been used to determine the electron density, with values as high as 10 20 m −3 [98]. Alternatively, millimetre wave transmission [99] and broadening of the hydrogen emission line have been used to measure electron densities and estimated to be between 10 19 m −3 and 10 21 m −3 [9,[100][101][102][103][104][105]. Experimental techniques for measuring the gas temperature are well established and straightforward due to the relatively small space-time variations associated with the neutrals.…”
Section: Simulation and Experimental Investigations Of The Mprmentioning
confidence: 99%
See 1 more Smart Citation
“…This technique has also been used to determine the electron density, with values as high as 10 20 m −3 [98]. Alternatively, millimetre wave transmission [99] and broadening of the hydrogen emission line have been used to measure electron densities and estimated to be between 10 19 m −3 and 10 21 m −3 [9,[100][101][102][103][104][105]. Experimental techniques for measuring the gas temperature are well established and straightforward due to the relatively small space-time variations associated with the neutrals.…”
Section: Simulation and Experimental Investigations Of The Mprmentioning
confidence: 99%
“…Experimental techniques for measuring the gas temperature are well established and straightforward due to the relatively small space-time variations associated with the neutrals. In addition to thermocouple measurements [106] and thermal imaging [101], optical monitoring of molecular emission bands for OH and N 2 has revealed that a range of temperatures exist from room temperature up to 2500 K [100,[102][103][104][105].…”
Section: Simulation and Experimental Investigations Of The Mprmentioning
confidence: 99%
“…For the low-energy electrons, they are in the non-local regime [20,22]. According to figure 5, the lengths of the lowenergy electrons (∼1 eV) are about 0.5 mm.…”
Section: Discussionmentioning
confidence: 98%