Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators

Dick, Andrew J.

doi:10.5545/sv-jme.2012.673

Cited by 9 publications

(3 citation statements)

References 21 publications

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“…By this method, the d 31 values have been determined at -11 pC/N and -30 pC/N for PZT deposited onto bare and RuO 2 coated substrates respectively, which confirms the benefit of the use of the interfacial oxide layer. However, the obtained piezoelectric coefficients values are located in the lowest part of the reported values, ranging from -10 pC/N [10] to -130 pC/N [11]. This can be explained by the non-oriented used substrate and the low annealing temperature and time (2 minutes at 650 °C) which lead to a non-optimized crystallization of the PZT.…”

Section: Piezoelectric Measurementscontrasting

confidence: 54%

Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (∼ 1 Hz)

Séveno¹,

Guiffard²,

Dufay³

et al. 2015

2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Func

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With the objective to harvest the airflow energy, flexible PbZrTiO 3 (PZT) thin films have been deposited onto ultra thin aluminium (Al) foil (16 μm).The piezoelectric properties of a PZT/aluminium cantilever have been investigated, and the measurements show d 31 values around 30 pm/V. Due to use of a very lightweight substrate, a very large deflection (in the millimeter range) of the tip of the beam have been observed, which is very promising for actuators applications. In a next step, PZT/aluminium films have been encapsulated with laminated polyethylene terephthalate (PET) in order to increase the flexibility of the device. The obtained structures were subjected to sinusoidal stress at very low frequencies (0.3 to 8 Hz) and the output voltages across a resistive load have been measured and compared to the theory with a good agreement. In addition, an intermediate ruthenium dioxide (RuO 2 ) layer has been used at the PZT/aluminium interface and its influence on the piezoelectric properties and the harvested power has been demonstrated.

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Section: Piezoelectric Measurementscontrasting

confidence: 54%

Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (∼ 1 Hz)

Séveno¹,

Guiffard²,

Dufay³

et al. 2015

2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Func

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show abstract

“…For the maximum applied DC field of 30 V/μm, an effective d 31 of 168.4 pm/V is present, which is more than one order of magnitude larger than the inherent piezoelectric coefficient of P(VDF-TrFE). Given this result, the electricfield-induced piezoelectric response is even stronger than the inherent piezoelectric activity of PZT with a d 31 of around −100 pm/V [9].…”

Section: Resultsmentioning

confidence: 95%

“…For instance, the piezoceramic AlN exhibits a d 31 of around −2 pm/V, representing only a moderate piezoelectric coefficient [7,8]. In contrast, the ferroelectric lead zirconate titanate PbZr 1−x Ti x O 3 (PZT) typically shows more than an order of magnitude larger piezoelectric response with a d 31 of around −100 pm/V [9].…”

Section: Introductionmentioning

confidence: 99%

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Hafner

Teuschel

Disnan

et al. 2021

Materials Research Letters

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Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response can be tuned and significantly enhanced. In this study, the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device, we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect, lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties. IMPACT STATEMENT The non-linear nature of the strong electrostrictive effect observed in ferroelectric polymers was used to enhance and control its piezoelectric activity by an electric field. A large and tunable piezoelectric response was verified in polymer-based MEMS resonators, proving the ability to tailor their actuating and sensing properties.

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Mixed‐Transducer Micro‐Origami for Efficient Motion and Decoupled Sensing

Zhu,

Ghrayeb,

et al. 2024

Small

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This work introduces a mixed‐transducer micro‐origami to achieve efficient vibration, controllable motion, and decoupled sensing. Existing micro‐origami systems tend to have only one type of transducer (actuator/sensor), which limits their versatility and functionality because any given transducer system has a narrow range of advantageous working conditions. However, it is possible to harness the benefit of different micro‐transducer systems to enhance the performance of functional micro‐origami. More specifically, this work introduces a micro‐origami system that can integrate the advantages of three transducer systems: strained morph (SM) systems, polymer based electro‐thermal (ET) systems, and thin‐film lead zirconate titanate (PZT) systems. A versatile photolithography fabrication process is introduced to build this mixed‐transducer micro‐origami system, and their performance is investigated through experiments and simulation models. This work shows that mixed‐transducer micro‐origami can achieve power efficient vibration with high frequency, large vibration ranges, and little degradation; can produce decoupled folding motion with good controllability; and can accomplish simultaneous sensing and actuation to detect and interact with external environments and small‐scale samples. The superior performance of mixed‐transducer micro‐origami systems makes them promising tools for micro‐manipulation, micro‐assembly, biomedical probes, self‐sensing metamaterials, and more.

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Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators

Cited by 9 publications

References 21 publications

Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (∼ 1 Hz)

Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (∼ 1 Hz)

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Mixed‐Transducer Micro‐Origami for Efficient Motion and Decoupled Sensing

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Characterizing Effective d31 Values for PZT from the Nonlinear Oscillations of Clamped-Clamped Micro- Resonators

Cited by 9 publications

References 21 publications

Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (&#x223C; 1 Hz)

Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (&#x223C; 1 Hz)

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Mixed‐Transducer Micro‐Origami for Efficient Motion and Decoupled Sensing

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Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (∼ 1 Hz)

Flexible PZT/aluminium thin films characterizations for energy harvesting at very low frequencies (∼ 1 Hz)