1982
DOI: 10.1063/1.331667
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Charge collection scanning electron microscopy

Abstract: A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM Rev. Sci. Instrum. 83, 095105 (2012) Foucault imaging by using non-dedicated transmission electron microscope Appl. Phys. Lett. 101, 093101 (2012) New Products Rev. Sci. Instrum. 83, 079501 (2012) Towards secondary ion mass spectrometry on the helium ion microscope: An experimental and simulation based feasibility study with He+ and Ne+ bombardment This review encompasses the application of the sca… Show more

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Cited by 772 publications
(343 citation statements)
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“…Both will contribute to free charge carrier population and minimize the exciton population in the measurement at hand (and in the actual working device). Variations in EBIC contrast reflect the dynamics of the carrier lifetime 9,13 . The intense signal close to the HTM-CH 3 NH 3 PbI 3 À x Cl x interface indicates efficient hole extraction.…”
Section: Resultsmentioning
confidence: 99%
“…Both will contribute to free charge carrier population and minimize the exciton population in the measurement at hand (and in the actual working device). Variations in EBIC contrast reflect the dynamics of the carrier lifetime 9,13 . The intense signal close to the HTM-CH 3 NH 3 PbI 3 À x Cl x interface indicates efficient hole extraction.…”
Section: Resultsmentioning
confidence: 99%
“…20 The electron beam of the SEM is scanning over the sample, inducing electron-hole pairs in the semiconductor. In absence of an electric field, these eventually recombine.…”
mentioning
confidence: 99%
“…The electron-beam acceleration voltage V acc was 10 kV. Since the lateral size of excitation volume was proportional to the V acc 1.75 , 12 the low acceleration voltage is preferable to improve the measurement resolution. On the other hand, an electron-beam with a low acceleration voltage will produce electron-hole pairs close to the surface, making the effect of surface recombination worse.…”
mentioning
confidence: 99%