1998
DOI: 10.1088/0953-8984/10/39/002
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Charge exchange and excitation in collision at medium energy (2-30 keV). Experiment and simulation

Abstract: ions were scattered from an amorphous silicon surface (a:Si) at relatively low incident energy (2-30 keV) to investigate the charge exchange processes and the electronic excitation mechanisms. The study was carried out as a function of several experimental parameters: primary energy , incidence angle and scattering angle . We show in this study that neutralization in the subsurface region of Si plays a significant role. The electron spectra show the same predominant autoionizing peaks as observed in scatteri… Show more

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Cited by 5 publications
(9 citation statements)
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“…In our calculations, γ = 0.00364 (1.5 × 10 14 /s) is used, a value that is very close to that (1.8 × 10 14 /s) presented in ref , which indicates that the value is reasonable. The widths used in our calculation are Γ ⊥ ( z ) = 12 exp­[−0.96­( z + 0.716)] and Γ ∥ ( z ) = 2.9 exp­[−1.05­( z + 0.716)] that are obtained from the literature .…”
Section: Resultssupporting
confidence: 79%
“…In our calculations, γ = 0.00364 (1.5 × 10 14 /s) is used, a value that is very close to that (1.8 × 10 14 /s) presented in ref , which indicates that the value is reasonable. The widths used in our calculation are Γ ⊥ ( z ) = 12 exp­[−0.96­( z + 0.716)] and Γ ∥ ( z ) = 2.9 exp­[−1.05­( z + 0.716)] that are obtained from the literature .…”
Section: Resultssupporting
confidence: 79%
“…In principle, the positive ion fraction in these studies at large energies , can be understood in terms of the exponential dependence of the inverse of exit angle for a given energy. , It is associated with the survival probability of positive ions during Auger and/or resonant neutralization along the outgoing trajectory proposed by Hagstrum . As we can see, the first two mentioned studies, , as well as ours, are different from other studies. , The descending rate of positive-ion fraction as a function of incident angle cannot be well explained by the exponential scaling as mentioned above. As a consequence, the reason for new findings about the dependence of positive-ion fraction on incident velocity and angle will be discussed in details in the next section.…”
Section: Resultscontrasting
confidence: 76%
“…Moreover, the increase is faster at small exit angles, and starts to slow down at high exit angles. It is consistent with many previous observations. , However, this trend is not consistent with our experimental data as shown in Figures and . Moreover, as discussed above, the survival probability related to is close to 1 due to the negligible v c .…”
Section: Discussionsupporting
confidence: 78%
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