Charge of clustered microparticles measured in spatial plasma afterglows follows the smallest enclosing sphere model

Minderhout, Boy van; Huijstee, J.C.A. van; Rompelberg, R M H; Post, A; Peijnenburg, A. T. A.; Blom, P.; Beckers, JL Jozef

doi:10.1038/s41467-021-23604-z

Cited by 15 publications

(11 citation statements)

References 70 publications

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“…The experimental setup used, schematically shown in Figure 1, has been extensively described in our previous works [30,[34][35][36][37]. Therefore, only a short overview of the key characteristics is included here, along with the implemented changes that are relevant for this work.…”

Section: Methodsmentioning

confidence: 99%

“…Just outside the field of view are two parallel Rogowski shaped electrodes [39,40], which can be used to apply a homogeneous horizontal electric field, for example when investigating microparticle charging, as was done in our previous works [11,30,[34][35][36][37]. The electrodes are each attached to a supporting plate made of PEEK (polyether ether ketone).…”

Section: Methodsmentioning

confidence: 99%

“…Our previous research focused on the (de-)charging of microparticles in the spatial afterglow of a low pressure inductively coupled plasma (ICP). In that research, the trajectories of injected particles and the influence of the electrostatic force generated by an externally applied electric field thereon were investigated for various plasma parameters and configurations [30,[34][35][36][37]. In the current paper we present experiments monitoring the trajectories of falling microparticles experiencing a combination of a spatial and a temporal afterglow plasma, in which an additional neutral drag force is revealed.…”

Section: Introductionmentioning

confidence: 99%

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Spatio-Temporal Plasma Afterglow Induces Additional Neutral Drag Force on Microparticles

Huijstee

Blom²,

Peijnenburg³

et al. 2022

Front. Phys.

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An emerging topic in complex plasma physics is the interaction between dust particles and afterglow plasmas. Control of plasma-particle interactions and specifically of the particle trajectories is especially relevant for plasma based contamination control applications. In systems where this contamination control is relevant, emerging or applied plasmas can be of highly transient nature, due to which contaminating particles interact with a combination of a spatial and a temporal afterglow plasma. Until now this type of plasmas and the possible interaction with embedded microparticles has remained far from fully explored in literature. In this work we visually record falling microparticles in a spatio-temporal afterglow of a low pressure inductively coupled plasma and observe a sudden and temporary reversal in their vertical velocity. Numerical simulations confirm that this effect is due to the cooling of the heated background gas in the former active plasma region, which creates a pressure wave and causes microparticles in the spatial afterglow to experience an additional neutral drag force in direction of the plasma bulk. Besides being an interesting principle phenomenon, the presence of this effect could have added value for developing plasma-driven particle contamination control applications. Moreover, for a well defined vacuum vessel geometry and plasma heating volume, this enables the use of microparticles in the spatio-temporal afterglow as probe for the neutral gas temperature in plasma.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Spatio-Temporal Plasma Afterglow Induces Additional Neutral Drag Force on Microparticles

Huijstee

Blom²,

Peijnenburg³

et al. 2022

Front. Phys.

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“…Over the years both experimental and numerical works have demonstrated thatdepending on plasma conditions and geometrythe residual charge of microparticles in afterglow plasmas can vary from highly negative, to partly and fully de-charged, and to even highly positive [3][4][5][6][7][8][9][10][11][12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

The role of neutral drag force in pulsed plasma enabled particle contamination control

Beckers

Huijstee

Blom³

et al. 2023

Metrology, Inspection, and Process Control XXXVII

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Driven by the continuous decrease of the length scales of fabricated semiconductor structures, ultraclean semiconductor processing equipment suffers more and more from contamination with nano- and micrometer sized particles, which may be introduced in such systems from the outside via gas flows either externally injected or through translational and/or rotational (robotic) feedthroughs. One promising approach to filter contaminating particulates from these gas flows is the application of a plasma particle seal in which airborne particles carried by a gas flow pick up free charges from a plasma and then are deflected by an externally applied electric field in the plasma’s afterglow region. Consecutively, these contaminating particles may be guided to less harmful locations in the system or even be fully removed. In this contribution, we present measurements that reveal the importance of additional drag forces imposed on the particles and the influence of these drag forces on the particles’ trajectories when the plasma is operated in pulsed mode.

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“…Discharging of nanosized and microsized particles (dust particles) in afterglow plasmas has been analyzed in many papers [1][2][3][4]. However, most of the authors in their theoretical and numerical studies have used "continuous discharging models" [5,6], i.e., the currents collected from the plasma, which determine the charge on a dust grain, are assumed to be continuous in time.…”

Section: Introductionmentioning

confidence: 99%

Discharging of Dust Particles of Different Sizes in an Argon Afterglow Plasma

Denysenko¹,

Mikikian²,

Azarenkov³

2022

Problems of Atomic Science and Technology

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The dust charge distribution function (DCDF) in an argon plasma afterglow is obtained by solving numerically the master equation describing dust discharging as a one-step stochastic process. The calculated DCDFs are compared with Gaussian distributions, and it is found that the dust charge distribution functions can be approximated quite well by the latter ones for different external conditions. It is found how the DCDF, mean dust charge, variance and charging time depend on dust size. For late afterglow times, it is also analyzed how the emission of electrons in the collisions of excited argon atoms with dust particles affects the DCDF. It is shown that the emission effect is more essential for larger nanoparticles than for smaller ones.

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Charge of clustered microparticles measured in spatial plasma afterglows follows the smallest enclosing sphere model

Cited by 15 publications

References 70 publications

Spatio-Temporal Plasma Afterglow Induces Additional Neutral Drag Force on Microparticles

Spatio-Temporal Plasma Afterglow Induces Additional Neutral Drag Force on Microparticles

The role of neutral drag force in pulsed plasma enabled particle contamination control

Discharging of Dust Particles of Different Sizes in an Argon Afterglow Plasma

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