We
found that continuous films of gold (Au) on oxidized silicon
(SiO2) substrates, upon treatment with ultraviolet (UV)-ozone,
exhibit strong adhesion to the SiO2 support. Importantly,
the enhancement is independent of micro- or nanostructuring of such
nanometer-thick films. Deposition of a second Au layer on top of the
pretreated Au layer makes the adhesion stable for at least 5 months
in environmental air. Using this treatment method enables us to large-scale
fabricate various SiO2-supported Au structures at various
thicknesses with dimensions spanning from a few hundreds of nanometers
to a few micrometers, without the use of additional adhesion layers.
We explain the observed adhesion improvement as polarization-induced
increased strength of Auδ−Siδ+ bonds at the Au–SiO2 interface due to the formation
of a gold oxide monolayer on the Au surface by the UV-ozone treatment.
Our simple and enabling method thus provides opportunities for patterning
Au micro/nanostructures on SiO2 substrates without an intermediate
metallic adhesion layer, which is critical for biosensing and nanophotonic
applications.