2013
DOI: 10.1063/1.4826898
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Charge transport and electroluminescence of silicon nanocrystals/SiO2 superlattices

Abstract: Charge transport and electroluminescence mechanisms in Si-rich Si oxynitride/silicon oxide (SRON/SiO2) superlattices deposited on p-type Si substrate are reported. The superlattice structures were deposited by plasma-enhanced chemical-vapor deposition and subsequently annealed at 1150 °C to precipitate and crystallize the Si excess into Si nanocrystals. The dependence of the electrical conduction on the applied voltage and temperature was found to be well described by a Poole-Frenkel transport mechanism over a… Show more

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Cited by 29 publications
(35 citation statements)
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“…In all samples, the SRON layer thickness, t SRON , was held constant at 3.5 nm, observed in a previous work to be close to the optimum EL performance [20]. The fabricated samples are summarized in table 1.…”
Section: Methodsmentioning
confidence: 99%
See 3 more Smart Citations
“…In all samples, the SRON layer thickness, t SRON , was held constant at 3.5 nm, observed in a previous work to be close to the optimum EL performance [20]. The fabricated samples are summarized in table 1.…”
Section: Methodsmentioning
confidence: 99%
“…The employed top-electrode circular area was ∼2 × 10 −3 cm 2 . Further information on the material deposition and the device processing has been reported in previous works [7,18,20].…”
Section: Methodsmentioning
confidence: 99%
See 2 more Smart Citations
“…Red or near infrared emission has been observed in these structures and has been related to both excitonic recombination taking place in conined states within Si-nps or relaxation of hot electrons [25,26].…”
Section: Introductionmentioning
confidence: 99%