2006
DOI: 10.1016/j.mser.2006.01.002
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Charged point defects in semiconductors

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Cited by 129 publications
(114 citation statements)
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“…9,10 Furthermore, improper change of group-V fluxes at the source and channel interface will introduce intermixing between As and Sb that leads to uncontrolled layer composition at this heterointerface, which in turn will produce high dislocation density in this region. 8,10 These dislocations will introduce fixed charges at the source/channel interface 15 and thus, it will affect the band alignment as well as the value of E beff . 10 Very recently, we have demonstrated by simulation that the band alignment is indeed converted from staggered gap to broken gap with a fixed positive charge density of $6 Â 10 12 /cm 2 caused by high dislocation density at the source/channel GaAs 0.35 Sb 0.65 /In 0.7 Ga 0.3 As interface.…”
Section: Introductionmentioning
confidence: 99%
“…9,10 Furthermore, improper change of group-V fluxes at the source and channel interface will introduce intermixing between As and Sb that leads to uncontrolled layer composition at this heterointerface, which in turn will produce high dislocation density in this region. 8,10 These dislocations will introduce fixed charges at the source/channel interface 15 and thus, it will affect the band alignment as well as the value of E beff . 10 Very recently, we have demonstrated by simulation that the band alignment is indeed converted from staggered gap to broken gap with a fixed positive charge density of $6 Â 10 12 /cm 2 caused by high dislocation density at the source/channel GaAs 0.35 Sb 0.65 /In 0.7 Ga 0.3 As interface.…”
Section: Introductionmentioning
confidence: 99%
“…The current reduction in the size of semiconductor devices has intensified the urgency of the requirement and made the atomic scale characterization of defects and impurities unprecedentedly important. 1 Scanning probe microscopy is a powerful technique because of its high spatial resolution. Since the development of scanning tunneling microscopy ͑STM͒, various techniques based on STM have been employed to analyze the atomic structures and electronic states of defects and impurities on semiconductor surfaces.…”
mentioning
confidence: 99%
“…The calculation of E F q in the bulk of pure materials has become routine (see review [3]) although there remain problems due to the approximations required (see discussion in [4]). Calculations become more complex and expensive if we consider defects at surfaces (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Calculations become more complex and expensive if we consider defects at surfaces (e.g. [5]) or interfaces between pure materials (rarely treated [3]), but overall a broad understanding of defects in pure materials has been achieved. However, many of the most important semiconductor materials are not pure at all, but alloys: either binary (e.g.…”
Section: Introductionmentioning
confidence: 99%
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