“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14] It is well known that in III-V semiconductors, three types of point defects, vacancies, interstitials, and antisites, determine the electrical and optical nature of a material. 15) For GaAs, As interstitials (As i ), Ga vacancies (V Ga ), and As antisites (As Ga ) are identified as the three major defects. 1,[16][17][18] EL2 defects, 17) a type of antisite defect, represent the majority defect type and create deep-level energy states in the forbidden band located approximately 0.8 eV below the conduction band (CB) minimum.…”