2022
DOI: 10.1109/tia.2021.3123930
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Charging and Levitation of Particles Using UV Irradiation and Electric Field

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Cited by 8 publications
(2 citation statements)
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“…Problem of calculation forces, acting on microparticles of condensed matter, so-called dust particles, in a plasma flowing environment, arises in a variety of industry applications [1,2,3] and fundamental issues [4,5,6,7], related to the complex plasma physics [8]. For example, flowing plasma can lead to the release of pollutant particles from a processed sample during extreme ultraviolet lithography important for microelectronics [1,3,2], which can lower the quality and productivity of the manufacturing processes. Controlling and minimizing contamination of such particles requires detailed study of the forces, acting on them.…”
Section: Introductionmentioning
confidence: 99%
“…Problem of calculation forces, acting on microparticles of condensed matter, so-called dust particles, in a plasma flowing environment, arises in a variety of industry applications [1,2,3] and fundamental issues [4,5,6,7], related to the complex plasma physics [8]. For example, flowing plasma can lead to the release of pollutant particles from a processed sample during extreme ultraviolet lithography important for microelectronics [1,3,2], which can lower the quality and productivity of the manufacturing processes. Controlling and minimizing contamination of such particles requires detailed study of the forces, acting on them.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, our levitation-based, single-nanoparticle method can be applied to in situ nanoparticle measurements requiring a high-precision charge and mass measurements, such as for levitated particles including lunar dust and aerosols. 19,20) The motion of a particle of mass m and the number of charges n q captured in an optical trap can be described by the following equation for a thermally and harmonically driven damped resonator: 17)  w w…”
mentioning
confidence: 99%