2006
DOI: 10.1002/sca.4950280508
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Charging compensation of alumina samples by using an oxygen microinjector in the environmental scanning electron microscope

Abstract: Summary: A gas microinjector system was set up in an environmental scanning electron microscope (ESEM) to create an oxygen atmosphere around the alumina samples for the charging compensation under a pressure between 2 × 10 Ϫ5 Pa~2 × 10 Ϫ2 Pa. At low pressures, the skirt effect of the electron scattering can be degraded, which results in improvement of the imaging contrast and increase of the signal/noise ratio. The sample current (I sc ) and the DuaneHunt limit were measured to evaluate the charging effect.

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Cited by 4 publications
(3 citation statements)
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“…However, if the ESP process is continued, the ejection time will be greatly enhanced and further jet instabilities may arise. Another strategy could be the hybridization of this system with a mechanism for charge compensation used in other applications, such as scanning electron microscopy. , Ji et al reported a noticeable charge decrease on Al 2 O 3 samples by employing an oxygen atmosphere through a local oxygen pressure device . Finally, another possible solution is to invert the electrode polarity between layer depositions.…”
Section: Results and Discussionmentioning
confidence: 99%
“…However, if the ESP process is continued, the ejection time will be greatly enhanced and further jet instabilities may arise. Another strategy could be the hybridization of this system with a mechanism for charge compensation used in other applications, such as scanning electron microscopy. , Ji et al reported a noticeable charge decrease on Al 2 O 3 samples by employing an oxygen atmosphere through a local oxygen pressure device . Finally, another possible solution is to invert the electrode polarity between layer depositions.…”
Section: Results and Discussionmentioning
confidence: 99%
“…The charge contrast is predominantly controlled by the localized variation of the SE emission coefficient. As expected, the bright strips below the surface of the steps exhibit greater SE emission than the surrounding areas as evaluated by measuring the sample current, I sc , (Ji et al ., 2005;Quan et al ., 2006) and shown in Figure 5 and Table I.…”
Section: The CCI On Patterned Sapphiresmentioning
confidence: 94%
“…As for the study of polymer ferroelectrics for space applications [65][66][67][68][69][70][71][72][73][74][75][76] , it should be noted that the processes similar to those during the polymer irradiation under an electron beam in a vacuum SEM chamber can also be observed in real outer space conditions when spacecrafts are bombarded with the particles (electrons, ions) of galactic and solar origin [77,78] . Even more interesting phenomena requiring surface charge compensation (including electromechanical ones) occur when observing dielectric samples in ESEM [79,80] and CryoEM (in particular, hydrocolloids or biological samples [81] ). The mechanisms underlying such phenomena of the sample surface charging can lead to the shift in the accuracy of X-ray spectral analysis and chemical element map quality deviation in variable pressure scanning electron microscopy [82,83] .…”
Section: Article Infomentioning
confidence: 99%