2008
DOI: 10.1088/0022-3727/41/24/245504
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Charging effects of PET under electron beam irradiation in a SEM

Abstract: This paper deals with charge trapping and charge transport of polyethylene terephthalate (PET) polymer subjected to electron irradiation in a scanning electron microscope (SEM). Measurement of displacement current and leakage current using an arrangement adapted to the SEM allows the amount of trapped charge during and after electron irradiation to be determined and the charge mechanisms regulation to be studied. These mechanisms involve several parameters related to the electronic injection, the characteristi… Show more

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Cited by 28 publications
(14 citation statements)
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“…However, σ should vary with the surface electric field under e‐beam irradiation. Note that, σ may somewhat vary with the surface state, the SE collector etc 39,40 …”
Section: Results and Analysesmentioning
confidence: 99%
“…However, σ should vary with the surface electric field under e‐beam irradiation. Note that, σ may somewhat vary with the surface state, the SE collector etc 39,40 …”
Section: Results and Analysesmentioning
confidence: 99%
“…Indeed, this trend is explained well in the light of the expression giving the displacement current that involves the secondary emission yield σ , the escape depth of SE and also the density of traps (Jbara et al. , ).…”
Section: The Investigations Methods Using Electron Irradiation In a Smentioning
confidence: 97%
“…The same technique was used by Thome [34] and Jbara [35] for investigation on the evolution of electrical properties of dielectric surfaces under electron bombardment. The study was devoted to electrical charging of the surfaces, therefore, results are not presented here.…”
Section: Indirect Methodsmentioning
confidence: 99%