Checkerboard deposition of lithium manganese oxide spinel (LiMn₂O₄) by RF magnetron sputtering on a stainless steel in all-solid-state thin film battery

LiCoO2 Battery Electrode Fabricated by High Deposition-Rate Atmospheric Plasma Spraying for Lithium Battery

“…Unfortunately, the film deposited by these processes, like sputtering, often showed the amorphous or nanocrystalline phase with a lower deposition rate. [7][8][9][10][11][12] Furthermore, the electrochemical properties also need to be improved by hightemperature post-annealing for several hours unless substrate heating or a uniquely patterned substrate is employed. [13][14][15] The above problems lead to the slow productivity of all-solidstate lithium batteries.…”