1994
DOI: 10.1002/anie.199410231
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Chemical Analysis of Inorganic and Organic Surfaces and Thin Films by Static Time‐of‐Flight Secondary Ion Mass Spectrometry (TOF‐SIMS)

Abstract: By using mass spectrometry to analyze the atomic and molecular secondary ions that are emitted from a solid surface when bombarded with ions, one obtains detailed information about the chemical composition of the surface. A time-of-flight mass spectrometer is especially suitable for the analysis of secondary ions because of its high transmission. high mass resolution, and ability to detect ions of different masses simultaneously. By using a finely focused primary ion beam it is also possible to analyze microar… Show more

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Cited by 480 publications
(312 citation statements)
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“…In ToF-SIMS, a pulsed, focused, energetic ion beam bombards a surface, leading to interactions that cause the emission of positive and negative secondary ions [33,34]. The instrument used was a reflectron type time-of-flight mass spectrometer, with a design equivalent to that of the 'ToF-SIMS IV'.…”
Section: Time Of Flight Secondary Ion Mass Spectrometry (Tof-sims)mentioning
confidence: 99%
“…In ToF-SIMS, a pulsed, focused, energetic ion beam bombards a surface, leading to interactions that cause the emission of positive and negative secondary ions [33,34]. The instrument used was a reflectron type time-of-flight mass spectrometer, with a design equivalent to that of the 'ToF-SIMS IV'.…”
Section: Time Of Flight Secondary Ion Mass Spectrometry (Tof-sims)mentioning
confidence: 99%
“…ToF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) analysis is a very powerful technique to assess the composition of a given material 36 by controlled sputtering. The capability to detect tiny traces of chemical species within small areas (less than 0.01 mm 2 ), and with a depth resolution that approaches the nm, makes it a particularly suitable tool for the investigation of nmthick layers, such as our SFS heterostructures, in the search for anomalies at the interfaces between layers, 37 or for contaminants between and inside the layers.…”
Section: Tof-simsmentioning
confidence: 99%
“…To overcome this difficulty, TOF spectrometers have been widely used [72,73]. Imaging MS has the unique ability to acquire the spatial distribution of a wide range of atoms, isotopes and molecules and, for many years, commercially available TOF-SIMS instruments have been able to produce mass resolution of several thousand in imaging mode [74,75].…”
Section: Secondary Ion Mass Spectrometry and Sputtered Neutral Mass Smentioning
confidence: 99%