2009
DOI: 10.1039/b822848e
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Chemical and electronic properties of the ITO/Al2O3 interface

Abstract: The interface formation between transparent conducting Sn-doped indium oxide (ITO) and dielectric aluminium oxide has been studied by photoelectron spectroscopy using in situ sample preparation by magnetron sputtering. The electronic structure including band alignment, changes in Fermi level position and work function is determined. The changes of Fermi level are related to the deposition technique used.

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Cited by 43 publications
(46 citation statements)
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“…The shift of the lone pair state to higher binding energy for surface segregated Sb 3+ in Sb-doped SnO 2 is a consequence of the higher nuclear charge on Sb as compared with Sn, and by an extension of these arguments it can be seen that In [129] and similar structure has been found in subsequent studies using laboratory [56,57,181,187] or synchrotron based [197] UV photoemission. The conduction band structure is in general very weak but resonances may be observed around the In 4p core threshold [197].…”
Section: Materials Preparationmentioning
confidence: 63%
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“…The shift of the lone pair state to higher binding energy for surface segregated Sb 3+ in Sb-doped SnO 2 is a consequence of the higher nuclear charge on Sb as compared with Sn, and by an extension of these arguments it can be seen that In [129] and similar structure has been found in subsequent studies using laboratory [56,57,181,187] or synchrotron based [197] UV photoemission. The conduction band structure is in general very weak but resonances may be observed around the In 4p core threshold [197].…”
Section: Materials Preparationmentioning
confidence: 63%
“…[185]. Structure in the bandgap has also been noted in He(I) and He(II) photoemission spectra of ITO thin films prepared by RF sputtering in an Ar or N 2 atmosphere [186][187][188]. The structure was found to be suppressed by addition of O 2 to the sputtering gas for ITO films studied in situ [56,181,189] or by subsequent annealing in air [189].…”
Section: Materials Preparationmentioning
confidence: 85%
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“…Three independent interface experiments, i.e. ITO deposit‐ed on BST 21, Al 2 O 3 deposited on ITO 22, and Al 2 O 3 deposited on BST 4 have been performed. The obtained energy band alignment is illustrated in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…[15][16][17][18] Figure 1. Modification of ITO was performed with 16-phosphonohexadecanoic acid (COOH) to functionalize the surface with terminal carboxylic acid groups.…”
Section: Sample Preparationmentioning
confidence: 99%