Chemical and Electronic Properties of ALD-Al&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt;/AlGaN Interfaces

Hori, Yuichi; Mizue, Chihoko; Ooyama, Kimihito; Miczek, M.; Hashizume, T.

doi:10.7567/ssdm.2009.g-8-2

Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials 2009

DOI: 10.7567/ssdm.2009.g-8-2

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Chemical and Electronic Properties of ALD-Al<sub>2</sub>O<sub>3</sub>/AlGaN Interfaces

Yuichi Hori¹,

Chihoko Mizue²,

Kimihito Ooyama³

et al.

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Chemical and Electronic Properties of ALD-Al<sub>2</sub>O<sub>3</sub>/AlGaN Interfaces

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