2018
DOI: 10.1016/j.surfcoat.2018.07.081
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Chemical and mechanical stability of air annealed cathodic arc evaporated CrAlON coatings

Abstract: This study reports the synthesis and characterization of ternary Cr-Al-O and quaternary Cr-Al-ON coatings deposited by cathodic arc physical vapour deposition, for various nitrogen and oxygen mass flow ratios during the growth process. The composition, microstructure, indentation hardness and modulus of the films have been characterized by scanning electron microscopy, electron probe micro-analysis, X-ray diffraction, and nanoindentation techniques. The evolution of the microstructure and mechanical properties… Show more

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Cited by 14 publications
(2 citation statements)
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“…A cubic oxide structure (gamma or fcc) grows at a low Cr/(Cr + Al) content, whereas a hexagonal oxide structure (alpha) is predominant at a higher Cr/(Cr + Al) content. The formation of an oxide coating structure with a dominating fcc phase has also been reported a number of times [166,179,180]. The lowest reported value to obtain a pure corundum phase was Cr/(Cr + Al) = 0.3 [178].…”
Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning
confidence: 90%
“…A cubic oxide structure (gamma or fcc) grows at a low Cr/(Cr + Al) content, whereas a hexagonal oxide structure (alpha) is predominant at a higher Cr/(Cr + Al) content. The formation of an oxide coating structure with a dominating fcc phase has also been reported a number of times [166,179,180]. The lowest reported value to obtain a pure corundum phase was Cr/(Cr + Al) = 0.3 [178].…”
Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning
confidence: 90%
“…The addition of oxygen into the AlCrN coating considerably influences the hardness and elastic modulus of the coating. Due to the smaller ratio of anion vacancies or solid solution strengthing effect, the hadness would increase by doping a small amount of oxygen, while there is a progressive decrease of hardness with increasing oxygent content [35]. Actually, the compositions of the coatings have a significant influence on the hardness, including Cr and Al contents [14,28].…”
Section: Mechanical Propertiesmentioning
confidence: 99%