2013
DOI: 10.4028/www.scientific.net/kem.594-595.551
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Chemical Composition Analysis of TiAlBN Nanocomposite Coating Deposited via RF Magnetron Sputtering

Abstract: TiAlBN nanocomposite coating have been successfully deposited on AISI 316 substrate via RF magnetron sputtering by varying nitrogen-to-total flow ratio (RN) of 5, 15, 20, 25%, as well as varying substrate temperature of 100, 200, 300, and 400 oC; using single Ti-Al-BN hot-pressed target. Chemical compositions of the coatings were analysed using X-ray photoelectron spectroscopy (XPS). XPS results showed that the TiAlBN nanocomposite coating reaches a nitride saturated state at higher RN(e.g 15, 20, and 25%) and… Show more

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Cited by 4 publications
(3 citation statements)
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“…Recently, a nanocomposite TiAlBN coating was successfully deposited via r.f. magnetron sputtering technique on a steel substrate which consist of nc-(Ti,Al)N, a-BN and a-TiB 2 phases [10][11]. Nitride based hard coatings like TiN, (TiAl)N, BN and etc.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, a nanocomposite TiAlBN coating was successfully deposited via r.f. magnetron sputtering technique on a steel substrate which consist of nc-(Ti,Al)N, a-BN and a-TiB 2 phases [10][11]. Nitride based hard coatings like TiN, (TiAl)N, BN and etc.…”
Section: Introductionmentioning
confidence: 99%
“…This coating has been proven that it can be deposited with many physical vapor deposition (PVD) techniques, for example the electronbeam (EB) evaporation [1], and the direct current (DC) magnetron sputtering [4]. However, only few researchers used the radio frequency (RF) magnetron sputtering technique on the deposition of the n-TiAlBN coating [5][6][7]. In order to acquire desirable properties from the TiAlBN coating, the design of the coating's microstructure is of particularly important.…”
Section: Introductionmentioning
confidence: 99%
“…One of the most simple but effective ways to prevent corrosion of magnesium is by coating the base materials [3]. Most recently, a nanocomposite TiAlBN coating (n-TiAlBN) has successfully being deposited on AISI 316 steel substrate from a single hot press compound target using magnetron sputtering technique producing coatings with a thickness of around 500 nm [4,5]. The coating comprise of (Ti,Al)N/a-BN/a-TiB 2 nanocomposite phases detected using GAXRD and XPS analysis with a grain size ranging from 3.5 -5.7 nm.…”
mentioning
confidence: 99%