The reaction of pentafluorobenzoic acid with 2-mercaptoethanol followed by modification of the reaction product by oxidationm halohydroxylation and (or) decarboxylation led to the formation of β-halo-and β-oxyethyl polyfluoroaryl sulfides, sulfoxides, and sulfones, initial compounds for the synthesis of fluorinecontaining 2,3-dihydro-1,4-benzothiazines, 2,3-dihydro-1,4-benzoxathiynes, and 2,3-dihydro-1,4-benzodithiynes and also of their S-oxides and S-dioxides based on intramolecular nucleophilic sybstitution.