Chemical metrology on latent resist images

Es, Maarten van; Tamer, Selman; Bloem, Elin; Fillinger, Laurent; Zeijl, E. van; Maturová, K Klara; Donck, Jacques van der; Willekers, Rob; Chuang, Adam; Maas, D.J.

doi:10.1016/j.mne.2023.100181

Cited by 2 publications

(1 citation statement)

References 25 publications

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“…Nonetheless, it is difficult to visualize and evaluate the photochemical patterns of polymeric layers without the lift-off process using conventional analytical methods, such as optical microscopy and atomic force microscopy, because the photochemical patterns barely show optical and topographical contrast. Vibrational spectroscopy, such as Raman and infrared (IR) absorption spectroscopy, is a promising way to visualize photochemically reacted products because it directly obtains chemical information on a sample by detecting the optical responses of molecules associated with molecular vibrations.…”

Section: Introductionmentioning

confidence: 99%

Mid-Infrared Photothermal Imaging of Photochemically Patterned Polymer Gate Dielectrics for Organic Thin-Film Transistors

Kato,

Taguchi,

Uemura

et al. 2024

ACS Appl. Electron. Mater.

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Mid-infrared photothermal (MIP) microscopy has recently attracted increasing attention for use in super-resolution infrared (IR) absorption imaging in a broad range of fields, including polymer sciences, owing to its high detection sensitivity and nanoscale spatial resolution. In this study, we present submicron IR imaging of ultrathin photopatternable polymer layers using MIP microscopy to visualize photochemically reacted micropatterns. Because micropatterning of ultrathin polymeric layers is beneficial for gate dielectrics to achieve operating organic thin-film transistors (OTFTs), we have demonstrated highperformance OTFTs with photopatterning of ultrathin polymer gate dielectrics and also examined the photochemical micropatterns by super-resolution IR imaging, which proved the successful photopatterning of ultrathin polymer gate dielectrics and provided direct spectroscopic insights into high-performance OTFTs in support of our experimental results. The present results demonstrate that MIP microscopy enables us to study the interfacial properties of photopatternable functional layers in electronic devices at the submicrometer scale and gain in-depth insights into engineering photolithographic base materials for electronics, thus accelerating the development of electronic devices.

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Section: Introductionmentioning

confidence: 99%

Mid-Infrared Photothermal Imaging of Photochemically Patterned Polymer Gate Dielectrics for Organic Thin-Film Transistors

Kato,

Taguchi,

Uemura

et al. 2024

ACS Appl. Electron. Mater.

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High throughput observation of latent images on resist using laser-based photoemission electron microscopy

Fujiwara,

Bareille,

Okawa

et al. 2024

Appl. Phys. Express

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The rapid evolution of lithography technology necessitates faster pattern inspection methods. Here, we propose the use of laser-based photoemission electron microscopy (laser-PEEM) for high-throughput observation of latent images on an electron beam resist. We revealed that this technique can visualize latent images as chemical contrasts, and estimated the throughput millions of times higher than those of an atomic force microscope. Moreover, we estimated that throughput tens of thousands of times higher than a single-beam scanning electron microscope is achievable for post-developed resist patterns. This breakthrough highlights the potential of laser-PEEM to revolutionize a high-throughput lithographic pattern inspection in semiconductor manufacturing.

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Chemical metrology on latent resist images

Cited by 2 publications

References 25 publications

Mid-Infrared Photothermal Imaging of Photochemically Patterned Polymer Gate Dielectrics for Organic Thin-Film Transistors

Mid-Infrared Photothermal Imaging of Photochemically Patterned Polymer Gate Dielectrics for Organic Thin-Film Transistors

High throughput observation of latent images on resist using laser-based photoemission electron microscopy

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