Chemical modification of carbon-coated anodic alumina films and their application to membrane filter

Kyotani, Takashi; Xu, Wei; Yokoyama, Yû; Inahara, Junichi; Touhara, Hidekazu; Tomita, Akira

doi:10.1016/s0376-7388(01)00599-3

Cited by 58 publications

(21 citation statements)

References 22 publications

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“…This phenomenon can be regarded as a particular case of templating effects described in Refs. [27,28], i.e. of an influence of the support's structure on the properties of very thin deposited layers.…”

Section: The Wetting and Sorption Properties Of The Catalytic Layermentioning

confidence: 99%

Structural and wetting properties of fuel cell components

Volfkovich

Сосенкин

Bagotsky

2010

Journal of Power Sources

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Section: The Wetting and Sorption Properties Of The Catalytic Layermentioning

confidence: 99%

Structural and wetting properties of fuel cell components

Volfkovich

Сосенкин

Bagotsky

2010

Journal of Power Sources

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“…Since CNT membranes can be internally [28] and externally [29] functionalized, CNTs have considerable promise for providing membrane systems with a wide range of transmission characteristics. Future work will focus on functionalized CNT membranes and their selective transmission properties for various analytes in solution.…”

Section: Discussionmentioning

confidence: 99%

Direct coupling of a carbon nanotube membrane to a mass spectrometer: Contrasting nanotube and capillary tube introduction systems

Miranda

Short

Amerom

et al. 2009

Journal of Membrane Science

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“…Although the anodization of thick-film AAOs usually takes a relatively longer time, it can produce highly ordered structures. For their monodispersed nanopores and the high aspect ratio, thick-film AAOs are favorable for applications such as gas filtrations and biological separations [4], [9], [16], [19], [25]. In comparison, thin-film AAOs have a thickness typically from tens of nanometers up to a few micrometers.…”

Section: Introductionmentioning

confidence: 99%

Freestanding Alumina Membrane by Double-Layer Anodization

Jiang

Turner

Spencer

2007

IEEE Trans. Nanotechnology

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A novel method has been developed for fabricating full or partial freestanding anodic alumina. In our method a sacrificial metal layer is introduced between an Al film and a Si 3 N 4 substrate. A freestanding alumina film at wafer scale is successfully achieved by anodizing the double metal layer, during which the alumina is spontaneously stripped off the Si 3 N 4 substrate due to the anodic oxidation of the sacrificial layer. The barrier oxide of the alumina film is effectively removed either by H 3 PO 4 dissolution or by CF 4 reactive ion etching. The freestanding alumina film is utilized as a contact mask to transfer its nanoporous pattern to a Si substrate. By patterning the sacrificial metal layer with contact lithography, a partial freestanding alumina film is successfully achieved on the silicon chip, producing a unique micro/nanofluidic channel. Compared with previous techniques, the method reported here is advantageous for its simplicity and flexibility.Index Terms-Anodic alumina, contact mask, double-layer anodization, freestanding, nanofluidic channel, sacrificial metal layer, thin film.

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Chemical modification of carbon-coated anodic alumina films and their application to membrane filter

Cited by 58 publications

References 22 publications

Structural and wetting properties of fuel cell components

Structural and wetting properties of fuel cell components

Direct coupling of a carbon nanotube membrane to a mass spectrometer: Contrasting nanotube and capillary tube introduction systems

Freestanding Alumina Membrane by Double-Layer Anodization

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