Chemical Properties of Ion Implanted Materials

Wolf, Gerhard

doi:10.1016/b978-0-12-341818-0.50015-2

Cited by 5 publications

(3 citation statements)

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“…For example, the influence on wet and dry corrosion and oxidation was discussed in P 4.3.2 and the formation of compounds such as nitrides, borides, oxides and carbides was treated in P 4.3.1. The application of ion implantation in the related fields of catalysis and electrochemistry has also attracted considerable interest over the past decade, as reviewed by Grant (1976) and Wolf( , 1981. Among the first reports of beneficial effects of ion implantation in these fields was that of Grenness et a1 (1974) in which platinum was implanted into tungsten to catalyse hydrogen evolution in an acid solution (hydrogen redox reaction).…”

Section: Corrosion Propertiesmentioning

confidence: 99%

“…Indeed, implantation has not yet been exploited commercially for improving electrocatalysis. Modification of gas-phase reactions at solid surfaces by ion implantation has received much less attention in the literature (Wolf 1979) and it has been suggested that this area of application may well prove fruitful in future studies (Wolf 1981).…”

Section: Corrosion Propertiesmentioning

confidence: 99%

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Materials modification with ion beams

Williams¹

1986

Rep. Prog. Phys.

134

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The incorporation of impurities into solids by bombardment with energetic ions is a non-equilibrium process which can result in intriguing near-surface property changes. This review initially examines the basic ion-solid interaction processes and outlines how such processes can lead to the modification of the composition, structure and surface topography of materials. Ion implantation has been exploited in widely diverse fields both as a powerful research tool for investigating solid state material processes and properties, and as a means of controllably modifying the electrical, physical, chemical, mechanical and optical properties of solid surfaces. These aspects receive major attention in this review which attempts to provide a balanced overview of the impact of ion implantation on solid state science and technology. In particular, special emphasis is given to implantation processes and applications in semiconductors which have received an enormous amount of attention in recent years, stimulated no doubt by the strong technological driving forces within the microelectronics industry. Ion bombardment processes and interesting property changes in metals are also discussed, and a selection of important technological applications is given. Finally, an overview of more recent investigations and applications is presented, including ion implantation into insulators and polymers, insight into crystal growth processes, adhesion of thin films to substrates, and research into ion bombardment of ices which has astrophysical significance.

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Section: Corrosion Propertiesmentioning

confidence: 99%

Section: Corrosion Propertiesmentioning

confidence: 99%

Materials modification with ion beams

Williams¹

1986

Rep. Prog. Phys.

134

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“…Some important monographs on the reaction mechanisms of hot atoms in solids and their applications can be found in Refs. [13][14][15][16][17][18][19][20][21][22][23][24][25][26]. The name "hot atom chemistry" can, however, also be applied to chemical processes by implanted ions.…”

Section: Introductionmentioning

confidence: 99%

Chemical modification of insulators by ion implantation, fundamental mechanisms and astrophysical implications

Rössler

1986

Radiation Effects

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Chemical processes upon ion implantation into insulators can be classified into two categories: high energy reactions of projectiles and secondary knock-on particles (so-called hot reactions), and the thermal reactions of radiation-induced radicals and defects. Hot reactions are characterized by the translational kinetic energy of at least some eV which the projectile carries into the reaction complex. This enables endothermic and high activation energy reactions, among them atom-molecule interactions. The often-used name Hot Atom Chemistry applies to the fact that due to neutralization processes most of the projectiles, at the end of their trajectories, reach the neutral charge state, irrespective of the charge of injection. These reactions can be studied (1) by ion implantation combined with optical spectroscopy, (2) via mass spectrometric analysis of molecules and molecular ions sputtered from surfaces, and (3) by nuclear recoil following nuclear reactions in conjunction with radiochromatographic techniques. Due to the fact that only the first method provides proper in-situ measurements, but operates in an extremely high dose regime, all three methods have to supplement each other. Furthermore, computer simulation of collision cascades may help to obtain information on the physical properties of the reaction medium.Superimposed on the primary hot reactions is the radiation chemistry of radicals and defects. This necessitates a detailed study of the dependence of chemical products on the total absorbed dose (fluence or integrated flux) and dose rate (flux) of the accompanying radiation. Doses below eV per target molecule in general do not result in measurable radiolytic changes. Between 0.1 and 10 eV per target molecule, radicals may survive recombination processes and may reduce or oxidize according to their reactivity, mobility and concentration. If the dose exceeds 10 eV per target molecule, decomposition may begin. The nuclear recoil method covers the dose regime between and lo2 eV per target molecule, whereas the ion implantation and chemical sputtering methods give access to the higher dose regime >I eV per target mokule.Systems treated in this review comprise simple inorganic salts, such as alkali and ammonium halides, LiH, LiNH2, MgO, A1203, etc., and ices such as frozen HzO, NH3 and CH4 at T<77 K.Special emphasis is given to the relatively new and exciting applications of hot atom chemistry to astrophysical problems : the specific formation of organic compounds and biomolecular precursors by impact of biogenic elements with cosmic dust grains, icy layers, comets and surfaces of outer planets and their satellites and the chemical reactions underlying the sputtering of ice or frozen volatiles. Hot atom chemistry, thus, may contribute to problems of chemical and prebiotic evolution by introducing the new type of energetic, endothermic and atom-molecule reactions into cosmic chemistry. 505Downloaded by [New York University] at 16:21 08 January 2015 22K. ROSSLER

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