2002
DOI: 10.1557/proc-723-o6.8
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Chemical Sensing With Resistive Microcantilevers

Abstract: MEMS-based microcantilevers have been proposed for a variety of biological and chemical sensing applications. Measuring the magnitude of microcantilever deflection due to adsorption-induced bending, and following the variation in the resonant frequency of the microcantilevers due to the adsorbed mass are two techniques commonly employed for sensing analytes. Apart from possessing a high level of sensitivity to small changes in mass, microcantilevers are also very sensitive to small changes in temperature and h… Show more

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