Chemical structure change of a KRF-laser irradiated PET fiber surface

Watanabe, Hirosuke; Yamamoto, Masahide

doi:10.1002/(sici)1097-4628(19990321)71:12<2027::aid-app12>3.0.co;2-k

Cited by 10 publications

(2 citation statements)

References 17 publications

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“…Since micropatterns, in this report, are generated through ablation of a thin polymer film by a laser source, it is conducive to briefly discuss the basic principles of laser ablation. Essentially, laser ablation is a process in which a small volume of polymer molecules in the exposed area of a focused laser beam absorb high optical energy, break up their molecular bonds and evaporate in gaseous form [15,[19][20]. In our system, polyethylene terephthalate (PET) was found to be an optimal choice of polymer for the 248 nm KrF excimer nanosecond laser (GSI Lumonics PM-848 UV Pulse Master from LightMachinery Inc., Ottawa, Ontario, Canada).…”

Section: Methods and Experimentsmentioning

confidence: 99%

Precision patterning of conductive polymer nanocomposite using a laser-ablated thin film

Liu¹,

Choi²

2012

J. Micromech. Microeng.

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We introduce a simple, reliable and low-cost microfabrication technique utilizing laser ablation of a thin polymer film to pattern polymer nanocomposite at a high resolution. A conductive composite of poly(dimethylsiloxane) (PDMS) and carbon nanotubes (CNTs) was selected due to their wide use in microelectromechanical systems (MEMS) and unique properties including flexibility and piezoresistivity. To pattern nanocomposite, an excimer laser ablated through a thin polyethylene terephthalate film creating mold patterns. PDMS-CNTs nanocomposite was then filled into the mold with excessive amount removed by a smooth-edged tool. Bulk PDMS was poured atop and cured. After debonding devices with relief patterns of polymer nanocomposite could be readily realized. Fabrication conditions were optimized which led to reliable patterning of various microstructures. Detailed surface profiling revealed excellent pattern authenticity and uniformity. Minimal feature size of patterns reached below 20 μm which indicated a significant improvement from prior reports. Moreover, the presented technique required only a software design to rapidly generate new patterns, thereby eliminating costly hardware such as lithography mask, stamp and clean room. Fabrication time and cost could be consequently reduced-ideal for lab prototyping purposes. Sensor examples are discussed to demonstrate versatile applications of polymer nanocomposite in MEMS.

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Section: Methods and Experimentsmentioning

confidence: 99%

Precision patterning of conductive polymer nanocomposite using a laser-ablated thin film

Liu¹,

Choi²

2012

J. Micromech. Microeng.

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show abstract

“…Essentially, laser ablation is a process in which a small volume of polymer molecules in the exposed area of a focused laser beam absorb high optical energy, break up molecular bonds and evaporate in gaseous form (Watanabe and Yamamoto 1999). The optical wavelength predicates the amount of energy absorbed by polymer molecules and therefore their evaporation state.…”

Section: Approachmentioning

confidence: 99%

Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Liu

Choi

2011

Microsyst Technol

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This work introduces a simple and low-cost microfabrication technique utilizing laser ablation to embed conductive elastomer nanocomposite within an insulating bulk elastomer. Nanocomposite consisting of poly(dimethylsiloxane) and a network of carbon nanotubes functions as a piezoresistive sensor material. Microstructures are embedded with the assist of laser ablation which utilizes a focused laser beam to ablate through a thin polymer film following a path programmed via software. This approach eliminates hardware such as photo-mask or stamp, which offers distinct advantages in reducing fabrication time and cost in prototyping of sensor devices. Various patterns of polymer film and embedded nanocomposite are demonstrated with spatial resolution down to 34 lm. To characterize patterning quality, different fabrication conditions are tested and uniformity (width, thickness) data are measured with optical profiling. Sensor prototypes are demonstrated based on the piezoresistive response of nanocomposite under tensile strain. Strain sensors could detect large-range ([45%) tensile strain with sensing a factor of about 4, showing promising feasibility for various sensing applications.

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Excimer laser chemical ammonia patterning on PET film

Paz

Chiussi

et al. 2008

J Mater Sci: Mater Med

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Laser is a promising technique used for biopolymer surface modification with micro and/or nano features. In this work, a 193 nm excimer laser was used for poly (ethylene terephthalate) (PET) surfaces chemical patterning. The ablation threshold of the PET film used in the experiments was 62 mJ/cm(2) measured before surface modification. Surface chemical patterning was performed by irradiating PET film in a vacuum chamber filled with ammonia at the flux of 10, 15, 20, 25 ml/min. Roughness of the surface characterized by profilometry showed that there were no significant observed change after modification comparing original film. But the hydrophilicity of the surface increased after patterning and a minimum water contact angle was obtained at the gas flux of 20 ml/min. FT-IR/ATR results showed the distinct amino absorption bands presented at 3352 cm(-1)and 1613 cm(-1) after modification and XPS binding energies of C(1s) at 285.5 eV and N(1s) at 399.0 eV verified the existence of C-N bond formation on the PET film surface. Tof-SIMS ions mapping used to identify the amine containing fragments corroborates that amino grafting mainly happened inside the laser irradiation area of the PET surface. A hypothesized radical reaction mechanism proposes that the collision between radicals in ammonia and on the PET surface caused by the incident laser provokes the grafting of amino groups.

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Chemical structure change of a KRF-laser irradiated PET fiber surface

Cited by 10 publications

References 17 publications

Precision patterning of conductive polymer nanocomposite using a laser-ablated thin film

Precision patterning of conductive polymer nanocomposite using a laser-ablated thin film

Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Excimer laser chemical ammonia patterning on PET film

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