Chemical vapor deposited graphene: From synthesis to applications

Abstract

Graphene is a material with enormous potential for numerous applications. Therefore, significant efforts are dedicated to large‐scale graphene production using a chemical vapor deposition (CVD) technique. In addition, research is directed at developing methods to incorporate graphene in established production technologies and process flows. In this paper, we present a brief review of available CVD methods for graphene synthesis. We also discuss scalable methods to transfer graphene onto desired substrates. Finally, we discuss potential applications that would benefit from a fully scaled, semiconductor technology compatible production process.

Piezoresistive properties of diamond like carbon films containing copper

“…These results were explained by encapsulation of the Ni nanoclusters embedded into the DLC matrix by several layers of graphene [6]. On the other hand, it should be mentioned that along A C C E P T E D M A N U S C R I P T ACCEPTED MANUSCRIPT 4 with nickel, main catalyst used for graphene deposition is copper [33][34][35]. DLC films containing Cu usually grow in the form of copper nanoparticles embedded into the DLC matrix due to the inability of copper to form bonds with carbon at room temperature [36][37][38].…”

Scalable Fabrication of 2D Semiconducting Crystals for Future Electronics

“…In most cases, the synthesized TMDCs have to be transferred from the growth substrates to the SiO2/Si substrates for device fabrication. Versatile techniques (Figure 23) have been developed for wafer-scale transfer of 2D materials [49][50][51]. They provide more flexibility for material synthesis and device fabrication.…”

Graphene and Two-Dimensional Materials for Optoelectronic Applications

“…Chemical vapor deposition (CVD) is a well-established technique in the semiconductor industry for growing a variety of conventional materials. Today, CVD can in principle fulfill the requirement of the large-scale growth of graphene and many 2D materials of the TMD family [9,10]. However, the reproducible synthesis of TMDs on a large scale is still challenging, and the process technology is far from optimized.…”

“…The graphene CVD process is based on the decomposition of hydrocarbons on catalytic/metallic surfaces, such as copper, at temperatures above 800˝C [9]. Growth temperatures as low as 300˝C have also been achieved using a microwave plasma-assisted CVD method [11].…”