Chemical vapor deposition experiments using new fluorinated acetylacetonates of calcium, strontium, and barium

Purdy, Andrew P.; Berry, A. D.; Holm, R. T.; Fatemi, M.; Gaskill, D. Kurt

doi:10.1021/ic00313a022

Cited by 109 publications

(46 citation statements)

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“…Strontium hexafluoroacetylacetone [Sr(HFA)2], from a reaction between excess H(HFA) and strontium, was purified by washing with excess H(HFA) (Purdy, Berry, Holm, Fatemi & Gaskill, 1989). After recovery of the H(HFA) from the filtrate on the vacuum line, the orange residue was dissolved in ether, transferred to a stoppered vial and set aside in the 'dri-lab'.…”

Section: Methodsmentioning

confidence: 99%

1,3,5,7-Tetrakis(trifluoromethyl)-2,6-dioxabicyclo[3.3.0]octane-3,7-diol

George¹,

Purdy²

1995

Acta Crystallogr C

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Section: Methodsmentioning

confidence: 99%

1,3,5,7-Tetrakis(trifluoromethyl)-2,6-dioxabicyclo[3.3.0]octane-3,7-diol

George¹,

Purdy²

1995

Acta Crystallogr C

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“…As we shall see, this is a feature often observed whenever organofluorine ligands come in contact with electropositive metal ions. It may not be a coincidence that such fluorinated metal complexes usually deposit metal fluorides when used as CVD precursors, although alkali metal fluorides are thermodynamically stable and might be expected to form in any case (9,10).…”

Section: Alkali and Alkaline Earth Derivativesmentioning

confidence: 99%

Recent Developments in the Chemistry of Fluorinated Isopropoxides and Tertiary Butoxides

Purdy

George

1994

ACS Symposium Series

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Studies on OCH(CF 3 ) 2 , OCMe(CF3) 2 , OCMe 2 (CF 3 ), and OC(CF3)3 derivatives of the alkali metals, alkaline earth metals, transition metals, and the lanthanide elements are reviewed, with emphasis on work reported since 1988. Alkali and alkaline earth fluoroalkoxides are generally made from reaction between the alcohol and the metal, its hydride, or organometallics. Most syntheses of transition metal derivatives involve reaction between metal halides and alkali or alkaline earth salts, or the alcoholysis of metal alkyls, alkoxides and amides. Coordination between organic fluorine and electropositive metals (ie. Na, Ba, Τl, Pr) is often observed in the crystal structures of these fluoroalkoxides and may be related to their use as chemical vapor deposition precursors for metal fluorides.Fluorinated metal alkoxides are of interest for a number of reasons. Complexes with bulky fluorinated alkoxy ligands usually have substantially greater volatility and solubility than their unfluorinated counterparts, primarily as a result of low polarizability of the C-F bond(7,2). In addition, the high electronegativity of Rp reduces the basicity of the alkoxy oxygen, which renders extended alkoxy bridged polymers less favorable than those with unfluorinated alkoxy groups (2). These properties are of interest in the design of new precursors for CVD (chemical vapor deposition) and sol-gel types of ceramic synthesis. Of note here is the ability of fluorinated metal complexes to serve as precursors for metal fluorides (3). The high electronegativity and oxidation resistance of fluorinated alkoxy groups can help to stabilize the higher oxidation states of some metals and also finds application in the design of new olefin metathesis catalysts.Although many types of fluoro-alkoxy ligands are known, this chapter is primarily concerned with the alkoxy derivatives of 1,1,1,3,3,3-hexafluoroisopropanol (HOCH(CF3)2, H[HFIP]), 1,1,1-trifluoro-im-butanol (HOCMe2CF3, HfTFTB]) 1,1,1,3,3,3-hexafluoro-fô/t-butanol (HOCMe(CF3)2, HfHFTB]), and perfluoro-terf-butanol (HOC(CF3)3, H[PFTB]). Emphasis is placed on compounds reported after 1988, as an excellent review by Willis details work prior to that time (2). Discussion will focus on the synthesis of these This chapter not subject to U.S.

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“…Precursors with alkaline earth metal ions are very attracting for high-temperature superconductors like BSCCO (Bi 2 Sr 2 CaCu 2 O 8 ) and YBCO (YBa 2 Cu 3 O 7 ). [3][4][5][6][7][8] Enhanced volatility and suitable thermal stability, accomplished by the formation of saturated metal ion environments, are two of the most essential requirements for the good performance of these CVD precursors. The addition of ligands with sufficient oxygen or nitrogen donor atoms to a formally unsaturated metal complex is a method to achieve coordinative saturation.…”

Section: Introductionmentioning

confidence: 99%