Chemical vapor deposition of cobalt silicide

West, Gary A.; Beeson, Karl W.

doi:10.1063/1.100558

Cited by 31 publications

(31 citation statements)

References 12 publications

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“…IIIB2͒, this still requires a temperature of about 60°C. 141 This temperature was not reached for the parasitic deposits nor for the primary deposits ͑judging from the absence of anomalously high growth rates such as in Fig. 15͒.…”

Section: Composition and Resistivitymentioning

confidence: 99%

A critical literature review of focused electron beam induced deposition

Dorp

Hagen

2008

Journal of Applied Physics

486

577

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An extensive review is given of the results from literature on electron beam induced deposition. Electron beam induced deposition is a complex process, where many and often mutually dependent factors are involved. The process has been studied by many over many years in many different experimental setups, so it is not surprising that there is a great variety of experimental results. To come to a better understanding of the process, it is important to see to which extent the experimental results are consistent with each other and with the existing model. All results from literature were categorized by sorting the data according to the specific parameter that was varied ͑current density, acceleration voltage, scan patterns, etc.͒. Each of these parameters can have an effect on the final deposit properties, such as the physical dimensions, the composition, the morphology, or the conductivity. For each parameter-property combination, the available data are discussed and ͑as far as possible͒ interpreted. By combining models for electron scattering in a solid, two different growth regimes, and electron beam induced heating, the majority of the experimental results were explained qualitatively. This indicates that the physical processes are well understood, although quantitatively speaking the models can still be improved. The review makes clear that several major issues remain. One issue encountered when interpreting results from literature is the lack of data. Often, important parameters ͑such as the local precursor pressure͒ are not reported, which can complicate interpretation of the results. Another issue is the fact that the cross section for electron induced dissociation is unknown. In a number of cases, a correlation between the vertical growth rate and the secondary electron yield was found, which suggests that the secondary electrons dominate the dissociation rather than the primary electrons. Conclusive evidence for this hypothesis has not been found. Finally, there is a limited understanding of the mechanism of electron induced precursor dissociation. In many cases, the deposit composition is not directly dependent on the stoichiometric composition of the precursor and the electron induced decomposition paths can be very different from those expected from calculations or thermal decomposition. The dissociation mechanism is one of the key factors determining the purity of the deposits and a better understanding of this process will help develop electron beam induced deposition into a viable nanofabrication technique.

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Section: Composition and Resistivitymentioning

confidence: 99%

A critical literature review of focused electron beam induced deposition

Dorp

Hagen

2008

Journal of Applied Physics

486

577

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“…Synthesis and structures of [1][2][3][4][5][6] Three new cobalt pyrazolate complexes were synthesized using either standard salt elimination routes from cobalt halides and the sodium or lithium salt of 3,5-(CF 3 ) 2 -Pz or by oxidative addition of the N-H bond of the parent pyrazole (3, ) 2 -PzH) to the highly reactive zero-valent Co complex Co(PMe 3 ) 4 (Scheme 1). The use of n-BuLi to generate the pyrazolate lithium salt was the first route explored.…”

Section: Resultsmentioning

confidence: 99%

“…[(PMe 3 )Co(μ-3,5-(CF 3 ) 2 -Pz) 2 (μ 3 -OH)Li] 2 (5). In order to investigate the interactions of these Co pyrazolate complexes with other oxygen containing species we investigated the reaction of (3) showing the atom numbering scheme.…”

Section: Paper Dalton Transactionsmentioning

confidence: 99%

“…Hydrogen atoms have been omitted for clarity. (5). Thermal ellipsoids are scaled to the 30% probability level.…”

Section: Paper Dalton Transactionsmentioning

confidence: 99%

“…Some of the best studied examples are, Co 2 (CO) 8 , CoH-(CO) 4 , CoCp 2 , CoCp(CO) 2 , and Co(CF 3 )(CO) 4 , which have all been used to deposit high purity cobalt films. 5,6 The Cp complexes require the use of H 2 in order to keep the carbon content to a minimum. Several coordination complexes, such as beta-diketonate derivatives (e.g.…”

Section: Introductionmentioning

confidence: 99%

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Synthesis and structures of Co bis-trifluoromethylpyrazolate complexes

Rivers

Jones

2013

Dalton Trans.

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Reactions of Co(PMe 3 ) 3 Cl or CoCl 2 with 3,5-(CF 3 ) 2 -PzNa in hexane give Co(PMe 3 ) 3 (3,5-(CF 3 ) 2 -Pz) (1) and Co(PMe 3 ) 3 (3,5-(CF 3 ) 2 -Pz) 2 (2) respectively (3,5-(CF 3 ) 2 -PzNa = sodium bis-trifluoromethylpyrazolate). Reaction of (3,5-(CF 3 ) 2 -PzH) with Co(PMe 3 ) 4 produces the unusual complex [cis-Co(PMe 3 ) 4 H 2 ][Co(PMe 3 )(3,5-(CF 3 ) 2 -Pz) 3 ] (3) which formally contains a [Co(III)] + [Co(II)] − complex ion pair. Reaction of 3,5-(CF 3 ) 2 -PzLi with an oxygenated suspension of CoCl 2 and 3 equivalents of PMe 3 gives (3,5-(CF 3 ) 2 -Pz) 2 Co(μ-3,5-(CF 3 ) 2 -Pz)(μ-OPMe 3 )Li(OPMe 3 ) 2 (4), while 2 reacts with LiOH to give [(PMe 3 )Co(μ-3,5-(CF 3 ) 2 -Pz) 2 (μ 3 -OH)Li] 2 (5).Both 2 and 3 react with O 2 in toluene solution to give Co(OPMe 3 ) 2 (3,5-(CF 3 ) 2 -Pz) 2 (6). All compounds have been characterized spectroscopically and by single crystal X-ray diffraction studies. † Electronic supplementary information (ESI) available: EPR spectra of 4 and 6 (2 pages). CCDC 887455-887460. For ESI and crystallographic data in CIF or other electronic format see

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Chemical Vapor Deposition of Assorted Metals

Hampden‐Smith

Kodas

1994

The Chemistry of Metal CVD

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Chemical vapor deposition of cobalt silicide

Cited by 31 publications

References 12 publications

A critical literature review of focused electron beam induced deposition

A critical literature review of focused electron beam induced deposition

Synthesis and structures of Co bis-trifluoromethylpyrazolate complexes

Chemical Vapor Deposition of Assorted Metals

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