1998
DOI: 10.1016/s0022-3697(97)00230-8
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Chemical Vapor Deposition of Metal Borides

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Cited by 31 publications
(19 citation statements)
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“…This phenomenon is apparently similar to the growth of single crystalline NdB 6 rods from polycrystalline LaB 6 . [32] The large NdB 6 cubes in Fig. 3(d) were approximately 15-20 µm across an edge.…”
Section: Neodymium Boride Filmsmentioning
confidence: 91%
“…This phenomenon is apparently similar to the growth of single crystalline NdB 6 rods from polycrystalline LaB 6 . [32] The large NdB 6 cubes in Fig. 3(d) were approximately 15-20 µm across an edge.…”
Section: Neodymium Boride Filmsmentioning
confidence: 91%
“…Single-crystalline nanowires were grown on metal substrates with a good yield and a small amount of amorphous boron impurity, similar to the CVD approaches that have also been used to produce LaB 6 whiskers with diameters over 1 lm [21,22,[25][26][27].…”
Section: Methodsmentioning
confidence: 99%
“…It is known (18) that, during thermal dissociation of B H , a series of higher boranes can be obtained, pentaborane (9), B H , and decaborane (14), B H , being among the most stable. It might be accepted that in a CVD process with the participation of diborane the real boron source would be one of these two compounds (with boiling points of 3333C and 2133C, respectively).…”
Section: Choice Of Boron Sourcesmentioning
confidence: 99%
“…Data were obtained on the temperature dependence of the change in Gibbs free energy of the reactions MeCl g #2BCl g #5.5H g "MeB #11HCl g [9] MeCl g #2BBr g #5.5H g "MeB #5HCl g #6HBr g [10] MeCl g #B H g "MeB #5HCl g #0.5H…”
Section: Cvd Of Niobium and Tantalum Diboridesmentioning
confidence: 99%
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