Chemical vapor deposition of metals: Part 1. An overview of CVD processes

Abstract

The chemical vapor deposition (CVD) of metals is a rapidly developing area in which metal-containing compounds are being synthesized as new precursors. This article reviews this area and discusses precursor design, reaction pathways, reactor types, and the influence of reactor operating conditions on film growth. We have gathered recent results for precursor design and CVD chemistry and show how analysis of results from CVD experiments can be used to assist in the development of new CVD precursors.

Semiconductor Integrated Elements Based on Nanostructures Silicon for Information Systems

“…Тому використання дешевих технологій одержання наноструктур Sі є однією з важливих проблем у розвитку нанотехнологій для їх подальшого застосування в наноелектромеханічних при-строях. Однією з таких технологій є викорис-тання методу хімічного травлення та хімічно-го парового осадження, що вже тривалий час сумісний з техногією виготовлення приладів мікро-і наноелектроніки [14][15][16][17][18][19][20][21][22].…”

Microwave Plasma Synthesis of Materials—From Physics and Chemistry to Nanoparticles: A Materials Scientist’s Viewpoint

“…The liquids can be fed accurately via syringe pumps. In principle, precursors used in CVD synthesis [77][78][79] are to some extent suitable as precursors for microwave plasma reactions. Table 1 shows a variety of solid, liquid and gaseous precursors with some relevant data.…”

Thermal decomposition of some silver(I) carboxylates under nitrogen atmosphere

“…Carboxylic acids: CH 3 CH 2 C(CH 3 ) 2 COOH (96 %), (CH 3 ) 3 SiCH 2 COOH (99 %), CF 3 COOH (99 %), (CH 3 ) 3 CCOOH (99 %), C 2 H 5 COOH (99.5 %), C 3 F 7 COOH (98 %), C 6 F 13 COOH (99 %) and (CF 2 ) 3 (COOH) 2 (97 %) were purchased from Aldrich, whereas AgNO 3 ([99.9 %), KNO 3 (99 %), NaHCO 3 (99.5 %), C 2 H 5 OH from POCH (Poland) and were used as received. All salts were prepared according to previously reported procedures [16][17][18].…”

“…'Silver(I) carboxylates and their complexes with tertiary phosphines have found applications as precursors for chemical vapor deposition (CVD) [1][2][3][4][5][6][7]. Silver thin layers produced by this method can be applied in microelectronic circuits, catalysis, as a bactericidal coatings [8], as mirrors and other applications [4,9].…”