Chemical vapour deposition of sp2-hybridised B-C-N materials from organoborons

Abstract

Up left: top view scanning electron micrograph (SEM) of sp 2 -BN grains and 3C-SiC grains on Si(111). Up right: top view SEM of r-BN grains on ZrB2, surrounded by a-BN. Bottom left: top view SEM of the surface of a 1.5 µm thick r-BN film deposited from TMB covered with a-BN. Bottom right: top view SEM of rhombohedral boron carbide grains on silicon carbide. Back side:Up: cross section SEM of DRAM structures of aspect ratio 60:1 (low magnification) and a-BxC film deep in the trenches (high magnification).Bottom, from left to right: top view SEM of sp 2 -BCxNy nanowalls deposited from plasma CVD, with increasing degree of disorder and complexity.During the course of research underlying this thesis, Laurent Souqui was enrolled in Agora Materiae, a multidisciplinary doctoral program at Linköping University, Sweden.