The selective synthesis of functional alkynylsilanes RC≡C–(SiMe2)m–X (m = 1, 3) was investigated. Monofunctionalization with or without protecting groups gave moderate to good yields of alkynyldimethylmonosilanes RC≡CMe2SiX [R = Ph, X = Cl (1), NEt2 (2), OMe (3), H (4), Br (5), I (6), Cp (8), C5H4Li (10), Ph (11); R = Pr, X = Ph (12)]. Compounds 4 and 8 were converted into the (alkyne)transition‐metal complexes 4·Cp2Mo2(CO)4 (13) and 8·Co2(CO)6 (14), respectively, which were characterized by X‐ray diffraction. Stepwise extension and functionalization of the silane chain starting from 1‐chloro‐2‐(diethylamino)tetramethyldisilane (Et2NMe2Si–SiMe2Cl) yielded the trisilanes Ph–(SiMe2)3–X [X = NEt2 (18), OMe (19), Cl (20), H (21), C≡CPh (22), C≡CPr (23)]. The synthesized compounds were characterized by NMR and IR spectroscopy, 4, 11, 13, and 14 also by UV/Vis spectroscopy.