ChemInform Abstract: Investigation of Dealuminated Mordenites by X‐Ray Photoelectron Spectroscopy.

Remy, M.; Genet, Mj.; Poncelet, Georges; Lardinois, Pf.; Notte, Pp.

doi:10.1002/chin.199226010

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“…The peak of Al 2p in Figure 8(a) can be fitted into three peaks, corresponding to Al 2 O 3 28 with a binding energy of 73.85 eV. The peaks at 74.35 and 74.84 eV can be attributed to AlOOH 29 and Al 2 Si 2 O 7 ⋅H 2 O, 30 respectively. From Figure 8(b), the peak of Si 2p with the binding energy of 102.18 eV corresponds to Al 2 Si 2 O 7 ⋅H 2 O.…”

Section: Resultsmentioning

confidence: 96%

Synthesis of Al₂O₃/SiO₂ core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

Zhao

Wang

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part E:

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A novel Al2O3/SiO2 core–shell composite abrasive was successfully synthesized via a facile sol–gel strategy and utilized to promote the surface quality and polishing efficiency of sapphire wafer. The silica shell with dense and amorphous structure was successfully coated on Al2O3 core. Its synthesis mechanism was discussed deeply, and good dispersibility and uniform particle size were obtained. The acquired core–shell composite particles were employed for the planarization machining of sapphire wafer. Results show that the decrease in surface roughness of Al2O3/SiO2 core–shell composite abrasives during polishing is more than 20.2% of that of pure Al2O3 abrasives, the material removal rate is more than 5.1% of that of pure Al2O3 abrasives, and the residual stress of the sapphire wafer finished by composite abrasives is decreased by approximately 40%. These results demonstrate that the Al2O3/SiO2 core–shell composite abrasives provide a more excellent polishing performance for the sapphire wafer, resulting in smoother and scratch-free surface with a higher material removal rate compared with pure Al2O3 abrasives. On the basis of the reaction product analysis and elastic-plastic micro-contact mechanics, the reasons for the improvement of polishing performance were revealed in terms of chemical corrosion and mechanical abrasion.

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Section: Resultsmentioning

confidence: 96%

Synthesis of Al₂O₃/SiO₂ core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

Zhao

Wang

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part E:

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ChemInform Abstract: Investigation of Dealuminated Mordenites by X‐Ray Photoelectron Spectroscopy.

Cited by 1 publication

References 1 publication

Synthesis of Al₂O₃/SiO₂ core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

Synthesis of Al₂O₃/SiO₂ core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

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ChemInform Abstract: Investigation of Dealuminated Mordenites by X‐Ray Photoelectron Spectroscopy.

Cited by 1 publication

References 1 publication

Synthesis of Al2O3/SiO2 core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

Synthesis of Al2O3/SiO2 core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

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Product

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About

Synthesis of Al₂O₃/SiO₂ core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

Synthesis of Al₂O₃/SiO₂ core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers