1998
DOI: 10.1016/s0008-6223(97)00177-2
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Chemistry and kinetics of chemical vapor deposition of pyrocarbon — IV pyrocarbon deposition from methane in the low temperature regime

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Cited by 141 publications
(94 citation statements)
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“…Relying on the schemes proposed by Becker and Hüttinger (1998), we consider a reaction scheme with N gs = 4 gas phase and one surface species, the solid pyrolytic carbon. We split this reaction scheme in homogeneous gas phase reactions and heterogeneous surface reactions.…”
Section: A Reduced Reaction Scheme As Chemical Modelmentioning
confidence: 99%
See 1 more Smart Citation
“…Relying on the schemes proposed by Becker and Hüttinger (1998), we consider a reaction scheme with N gs = 4 gas phase and one surface species, the solid pyrolytic carbon. We split this reaction scheme in homogeneous gas phase reactions and heterogeneous surface reactions.…”
Section: A Reduced Reaction Scheme As Chemical Modelmentioning
confidence: 99%
“…Recently, reduced reaction schemes for describing the gas phase chemistry in chemical vapour deposition (CVD) of pyrolytic carbon from methane were published and compared with experimental results (Hüttinger, 1998;Benzinger et al, 1996;Becker and Hüttinger, 1998). They include composition reactions in the gas phase yielding intermediate gas phase species as well as several reactions for carbon formation from different gas phase species.…”
Section: Introductionmentioning
confidence: 99%
“…Because of the tremendous number of chemical reactions taking place during the deposition process, it is usually assumed to decrease the reactions number by the so-called simplified (reduced) reaction scheme. In this study, we utilize the proposal by Becker et al [11] and Becker and Hüttinger [12] for a reduced reaction scheme. The proposal is based on separation of chemical reactions in equivalence classes established on the basis of similarities between the species.…”
Section: Reaction Kineticsmentioning
confidence: 99%
“…The chemical model of reaction kinetics is considered in Section 3. A reduced reaction scheme proposed by Becker et al [11] and Becker and Hüttinger [12] is used regarding species classes. They contain different species with the same number of carbon atoms.…”
Section: Introductionmentioning
confidence: 99%
“…The PyCs with a variety of morphology, texture and structure have been obtained, depending on the deposition parameters including deposition temperature, carbon source, types of substrate and even the geometry of reaction chamber. The deposition kinetics and mechanism of pyrolytic carbon have been studied quite extensively by many researchers [14][15][16][17][18][19][20][21][22]. One of the main mechanisms is the droplet model that polyaromatic hydrocarbon molecules (PAH), which are formed in gas phase, play an important role in the nucleation and growth of PyC.…”
Section: Introductionmentioning
confidence: 99%