1998
DOI: 10.1016/s0008-6223(97)00176-0
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Chemistry and kinetics of chemical vapor deposition of pyrocarbon — III pyrocarbon deposition from propylene and benzene in the low temperature regime

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Cited by 111 publications
(52 citation statements)
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“…A reduced gas-phase consecutive reaction mechanism is employed to calculate overall gas-phase reaction kinetic data (k 1 -k 4 ) [18]. Original surface reaction kinetic data (k 6 -k 8 ) are obtained by fitting them to CVD experimental results [19][20][21]. Based on the hydrogen inhibition model proposed before [22], effective surface reaction kinetic data K i (i =6, 7, 8) of CVI are defined as k i f i , where f i is the hydrogen inhibition function.…”
Section: Multi-step Chemical Vapor Deposition and Hydrogen Inhibitionmentioning
confidence: 99%
“…A reduced gas-phase consecutive reaction mechanism is employed to calculate overall gas-phase reaction kinetic data (k 1 -k 4 ) [18]. Original surface reaction kinetic data (k 6 -k 8 ) are obtained by fitting them to CVD experimental results [19][20][21]. Based on the hydrogen inhibition model proposed before [22], effective surface reaction kinetic data K i (i =6, 7, 8) of CVI are defined as k i f i , where f i is the hydrogen inhibition function.…”
Section: Multi-step Chemical Vapor Deposition and Hydrogen Inhibitionmentioning
confidence: 99%
“…This work also considers the species not larger than the reactant propene as stated in Refs. [17][18][19] Fig. 1) are listed in Supplement 2 and will be used in the high-temperature heat capacity and entropy evaluations in the rotational partition functions.…”
Section: Resultsmentioning
confidence: 99%
“…50,51 Heat capacity, entropy, enthalpy, and Gibbs free energy of the species at 298.15 K are evaluated with the standard statistical thermodynamics procedures by using the B3PW91/6-311G(d,p) geometries, frequencies (scaled by 0.9631 46 ). The energy barriers at 1200 K (a temperature close to the generally adopted reaction condition 17,19,28,36,52,53 ) are calculated classically with the established heat capacities.…”
Section: Methodsmentioning
confidence: 99%
“…O outro processo denominado infiltração em fase gasosa (CVI) refere-se à impregnação por meio de gás, que contém carbono em sua molécula, elemento que se decompõe no substrato poroso de fibras de carbono. Esse processo, além de com plexo em seu controle, demanda um longo tempo, porque o preenchimento completo dos vazios ao redor das fibras baixas requer temperaturas de processo na faixa de 900-1000 ºC, para evitar que a etapa preponderante de deposição seja controlada por difusão (Becker, 1998;Delhaès, 2002).…”
Section: Processamento De Compósitos Termoestruturaisunclassified