Chemistry and processing of resists for nanolithography

Novembre, Anthony E.; Liu, S.

doi:10.1533/9780857098757.194

Cited by 12 publications

(11 citation statements)

References 238 publications

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“…Calixarenes have relatively high thermal stability ( T m > 300 °C), which permits their application in various chemical environments . Deligöz et al reported that the coordination of metal with calixarene affects its thermal stability.…”

Section: Catalysts For Slurry-phase Hydrocrackingmentioning

confidence: 99%

“…It had been suggested that the in situ formation of active metal sites with a high surface-area-to-volume ratio could be better achieved by enhancing the solubility of metal-based calixarenes through derivatization. An example of such highly derivatized parent molecules is hexaacetate p -methylcalix[6]arene. , …”

Section: Catalysts For Slurry-phase Hydrocrackingmentioning

confidence: 99%

“…Calixarenes have relatively high thermal stability (T m > 300 °C), which permits their application in various chemical environments. 129 Deligoz et al 130 reported that the coordination of metal with calixarene affects its thermal stability. It was observed that the calix[n]arene-Fe 3+ complexes (n = 4, 6, 8) complexes start to degrade above 200 °C.…”

Section: Energy and Fuelsmentioning

confidence: 99%

“…An example of such highly derivatized parent molecules is hexaacetate p-methylcalix [6]arene. 129,134 Because of their unique property of having a high surfacearea-to-volume ratio, dispersed catalysts are considered as an alternative for the solid powder catalysts. Dispersed catalysts have proven high catalytic activity that make them desirable for the slurry-phase hydrocracking of heavy oil.…”

Section: Energy and Fuelsmentioning

confidence: 99%

See 3 more Smart Citations

Recent Advances in Heavy Oil Upgrading Using Dispersed Catalysts

Al‐Attas

Ali²,

Zahir³

et al. 2019

Energy Fuels

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Unconventional feedstocks, such as heavy vacuum residue (VR), have become potential candidates that could be positively exploited to meet the increasing demand of high-value transportation fuels, in view of the growing scarcity in other energy sources. However, such feeds contain extremely high-molecular-weight species, besides many impurities of heteroatom-containing organic compounds that lead to quick fouling, poisoning, and deactivation of catalysts. This causes a significant pressure decrease during the conventional hydrocracking in ebullated- or fixed-bed reactors. In contrast, slurry-phase hydrocracking has the ability to overcome these drawbacks through the enhancement of hydrogenation reactions in the presence of the dispersed catalysts. Slurry-phase processing is a resilient technology, which employs catalysts that are generally categorized as heterogeneous solid supported catalysts and homogeneously dispersed catalysts. The dispersed catalysts are classified into water or oil-soluble types and fine powders. Soluble dispersed catalysts show higher catalytic activity, compared to finely powdered catalysts, because of the in situ formation of infinitesimally minute active metal sites at high surface-area-to-volume ratios. Recent technologies and studies on heavy oil upgrading that implement the dispersed catalysts have been reviewed. Studies using a combination of two-phase catalysts have also been included.

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Section: Catalysts For Slurry-phase Hydrocrackingmentioning

confidence: 99%

Section: Catalysts For Slurry-phase Hydrocrackingmentioning

confidence: 99%

Section: Energy and Fuelsmentioning

confidence: 99%

Section: Energy and Fuelsmentioning

confidence: 99%

See 2 more Smart Citations

Recent Advances in Heavy Oil Upgrading Using Dispersed Catalysts

Al‐Attas

Ali²,

Zahir³

et al. 2019

Energy Fuels

View full text Add to dashboard Cite

show abstract

“…Nano-patterns do not require optical apparatus [36] Low throughput for batch manufacturing [37,38] Deposited material is controlled by hydrophobicity of the surface [36] Probe tip may be subjected to wear resulting in poor reproducibility [36] AFM tip can be changed to generate a random pattern [36] Ambient conditions need to be constant as humidity affects printing ink ensuing in deformed pattern. [36] In situ imaging capability [33] Hollow AFM tip can only permit certain compounds to pass.…”

Section: Advantages Disadvantagesmentioning

confidence: 99%

High Precision 3D Printing for Micro to Nano Scale Biomedical and Electronic Devices

et al. 2022

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Three dimensional printing (3DP), or additive manufacturing, is an exponentially growing process in the fabrication of various technologies with applications in sectors such as electronics, biomedical, pharmaceutical and tissue engineering. Micro and nano scale printing is encouraging the innovation of the aforementioned sectors, due to the ability to control design, material and chemical properties at a highly precise level, which is advantageous in creating a high surface area to volume ratio and altering the overall products’ mechanical and physical properties. In this review, micro/-nano printing technology,mainly related to lithography, inkjet and electrohydrodynamic (EHD) printing and their biomedical and electronic applications will be discussed. The current limitations to micro/-nano printing methods will be examined, covering the difficulty in achieving controlled structures at the miniscule micro and nano scale required for specific applications.

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Toward Defect‐Free Nanoimprinting

Guan,

Huang,

Song

et al. 2024

Small

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Nanoimprinting large‐area structures, especially high‐density features like meta lenses, poses challenges in achieving defect‐free nanopatterns. Conventional high‐resolution molds for nanoimprinting are often expensive, typically constructed from inorganic materials such as silicon, nickel (Ni), or quartz. Unfortunately, replicated nanostructures frequently suffer from breakage or a lack of definition during demolding due to the high adhesion and friction at the polymer‐mold interface. Moreover, mold degradation after a limited number of imprinting cycles, attributed to contamination and damaged features, is a common issue. In this study, a disruptive approach is presented to address these challenges by successfully developing an anti‐sticking nanocomposite mold. This nanocomposite mold is created through the co‐deposition of nickel atoms and low surface tension polytetrafluoroethylene (PTFE) nanoparticles via electroforming. The incorporation of PTFE enhances the ease of polymer release from the mold. The resulting Ni‐PTFE nanocomposite mold exhibits exceptional lubrication properties and a significantly reduced surface energy. This robust nanocomposite mold proves effective in imprinting fine, densely packed nanostructures down to 100 nm using thermal nanoimprinting for at least 20 cycles. Additionally, UV nanoimprint lithography (UV‐NIL) is successfully performed with this nanocomposite mold. This work introduces a novel and cost‐effective approach to reusable high‐resolution molds, ensuring defect‐reduction production in nanoimprinting.

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Chemistry and processing of resists for nanolithography

Cited by 12 publications

References 238 publications

Recent Advances in Heavy Oil Upgrading Using Dispersed Catalysts

Recent Advances in Heavy Oil Upgrading Using Dispersed Catalysts

High Precision 3D Printing for Micro to Nano Scale Biomedical and Electronic Devices

Toward Defect‐Free Nanoimprinting

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