Defect engineering is widely used to impart the desired
functionalities
on materials. Despite the widespread application of atomic-resolution
scanning transmission electron microscopy (STEM), traditional methods
for defect analysis are highly sensitive to random noise and human
bias. While deep learning (DL) presents a viable alternative, it requires
extensive amounts of training data with labeled ground truth. Herein,
employing cycle generative adversarial networks (CycleGAN) and U-Nets,
we propose a method based on a single experimental STEM image to tackle
high annotation costs and image noise for defect detection. Not only
atomic defects but also oxygen dopants in monolayer MoS2 are visualized. The method can be readily extended to other two-dimensional
systems, as the training is based on unit-cell-level images. Therefore,
our results outline novel ways to train the model with minimal data
sets, offering great opportunities to fully exploit the power of DL
in the materials science community.