Development of trace element analysis by charged-particle induced X-ray fluorescence spectrometry is reviewed, with emphasis on specimen preparation and calibration. A case is presented for the use of wet-digested specimens together with internal standards. Data on ionization cross-sections, fluorescence yields, and detector efficiencies, quantities necessary for measurements relative to internal standards, are reviewed. Experiments are described which test specimen sampling procedures, target integrity, consistency among different standards, and the accuracy and reproducibility of analytical results. Analyses of wines, biomedical specimens, and NBS orchard leaves are described. For fluids, detection limits are 0.01 to 0.1 ppm while, for wetdigested tissues, the limits relative to the original material are 0.1 to 1 ppm.The use of charged-particle beams from accelerators as a means of excitation in energy-dispersive X-ray fluorescence spectrometric analysis has received considerable attention in the past four years. Widespread interest in this