Chromium nitride films synthesized by radio-frequency reactive ion plating

Abstract

Articles you may be interested inRefractive index control of silicon nitride films prepared by radio-frequency reactive sputtering Magnetic and structural properties of iron nitride thin films obtained by argonnitrogen reactive radiofrequency sputtering J. Appl. Phys. 77, 5309 (1995); 10.1063/1.359286Indium nitride thin films prepared by radiofrequency reactive sputtering Cr-N films were synthesized successfully on the stainless steel and the high-speed steel plates by rf reactive ion plating. Cr was evaporated from an electron beam evaporator into the N2 or NH3 gas plasma at the pressure of the order of 10-2 Pa. The optimum net rfpower to synthesize was about 200 W. The amount of Cr and N atoms contained in the synthesized layer were measured by Auger electron spectroscopy. The crystal structure of the layer was analyzed by x-ray diffraction and reflection high energy electron diffraction. The resulting Cr-N films formed by rfreactive ion plating had two types of crystal structures composed of fJ-Cr2N and CrN, and the type of structure was able to be controlled easily by the ion plating conditions. The structure of the hardest film was found to be fJ-Cr2N (hexagonal structure) by micro-Vickers method. All the films synethsized under the various conditions by the method were observed to be composed of small size grains with microcracks.

Optical Thin Film Coating Having High Damage Resistance in Near-Stoichiometric MgO-Doped LiTaO3

“…The deposition materials Ta 2 O 5 and SiO 2 were vaporized using an electron beam using ion plating deposition in an atmosphere of O 2 gas. [5][6][7] In this case, for deposition rate control, we used glass and crystal monitors to regulate film thickness. The sample coating consisted of Ta 2 O 5 and SiO 2 on a BK7 substrate with a roughness of 0.8 nm rms.…”

Effect of periodicity on hardness and scratch resistance of CrN/NbN nanoscale multilayer coating deposited by cathodic arc technique

“…The mechanical properties of those systems strongly depend on the properties of each sub-layer, on the periodicity (Λ) and on the coherency of the interface between the layers. From the many materials that can be chemically modulated in a nanoscale multilayer, the NbN/CrN system has attracted particular attention, since niobium nitride (NbN) stands out for its chemical stability [3], while chromium nitride (CrN) is an extremely hard and inert coating, being used since the beginning of the 1980s [1,12,13]. Hovsepian et al [14] have reported a superior pin on disk wear resistance of sputtered CrN/NbN multilayer coatings deposited by the PVD magnetron sputtering, when compared to single layer coatings and to electrodeposited chromium [15,16].…”

Thick CrN/NbN Multilayer Coating Deposited by Cathodic Arc Technique

“…In recent years, multilayer CrN/NbN coatings have attracted Engineer's attention, since the niobium nitride component (NbN) stands out for its chemical stability 8 and the chromium nitride (CrN) is a hard and inert coating component 2,3 , offering the temperature resistance required for working in the combustion chamber environment. NbN/ CrN nanostructured multilayer coating combines high hardness with chemical stability and toughness.…”

“…The CrN is a classic coating system, which is technologically relevant since the early 1980's [1][2][3][4][5] . The high hardness and lower friction coefficient, when compared to other piston ring system coatings 2,6,7 , has drawn engineer's attention to the use of this kind of coating for internal combustion engine components.…”