Chronically Implantable Package Based on Alumina Ceramics and Titanium with High-density Feedthroughs for Medical Implants

Yang, Hangao; Wu, Tianzhun; Zhao, Siqi; Xiong, Sidong; Peng, Bo; Humayun, Mark S.

doi:10.1109/embc.2018.8513004

Cited by 8 publications

(6 citation statements)

References 14 publications

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“…Recently, several works have demonstrated PIB for implantable devices such as intracranial pressure sensors, stents, and optogenetic stimulators [166,167,168], but its long-term reliability needs to be investigated for chronic implantation. While miniaturization of traditional titanium package for further reduced form factor and higher feedthrough density is also being pursued by means of advancement in precision machining and brazing, its compatibility with microfabricated devices is yet to be solved [169,170].…”

Section: Discussionmentioning

confidence: 99%

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

2019

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The development of reliable long-term encapsulation technologies for implantable biomedical devices is of paramount importance for the safe and stable operation of implants in the body over a period of several decades. Conventional technologies based on titanium or ceramic packaging, however, are not suitable for encapsulating microfabricated devices due to their limited scalability, incompatibility with microfabrication processes, and difficulties with miniaturization. A variety of emerging materials have been proposed for encapsulation of microfabricated implants, including thin-film inorganic coatings of Al2O3, HfO2, SiO2, SiC, and diamond, as well as organic polymers of polyimide, parylene, liquid crystal polymer, silicone elastomer, SU-8, and cyclic olefin copolymer. While none of these materials have yet been proven to be as hermetic as conventional metal packages nor widely used in regulatory approved devices for chronic implantation, a number of studies have demonstrated promising outcomes on their long-term encapsulation performance through a multitude of fabrication and testing methodologies. The present review article aims to provide a comprehensive, up-to-date overview of the long-term encapsulation performance of these emerging materials with a specific focus on publications that have quantitatively estimated the lifetime of encapsulation technologies in aqueous environments.

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Section: Discussionmentioning

confidence: 99%

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

2019

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“…When using metal pastes, slurries containing metal particles are screen printed into vias machined into the green body and sintered along with the ceramic (Fig. 4d) (Yang, et al, 2018, Green, et al, 2013. Afterwards, the ceramic substrate with metal vias can be metallized again to form interconnects.…”

Section: Joining and Metallization Of Ceramicsmentioning

confidence: 99%

“…This method has been able to create 10 × 10 arrays of feedthroughs with pitches between 400 and 450 µm. When using metal pastes, slurries containing metal particles are screen printed into vias machined into the green body and sintered along with the ceramic (figure 4(d)) [64,77]. Afterwards, the ceramic substrate with metal vias can be metallized again to form interconnects.…”

Section: Joining and Metallization Of Ceramicsmentioning

confidence: 99%

Ceramic packaging in neural implants

Shen

Maharbiz

2021

J. Neural Eng.

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The lifetime of neural implants is strongly dependent on packaging due to the aqueous and biochemically aggressive nature of the body. Over the last decade, there has been a drive towards neuromodulatory implants which are wireless and approaching millimeter-scales with increasing electrode count. A so-far unrealized goal for these new types of devices is an in-vivo lifetime comparable to a sizable fraction of a healthy patient’s lifetime (>10–20 years). Existing, approved medical implants commonly encapsulate components in metal enclosures (e.g. titanium) with brazed ceramic inserts for electrode feedthrough. It is unclear how amenable the traditional approach is to the simultaneous goals of miniaturization, increased channel count, and wireless communication. Ceramic materials have also played a significant role in traditional medical implants due to their dielectric properties, corrosion resistance, biocompatibility, and high strength, but are not as commonly used for housing materials due to their brittleness and the difficulty they present in creating complex housing geometries. However, thin-film technology has opened new opportunities for ceramics processing. Thin films derived largely from the semiconductor industry can be deposited and patterned in new ways, have conductivities which can be altered during manufacturing to provide conductors as well as insulators, and can be used to fabricate flexible substrates. In this review, we give an overview of packaging for neural implants, with an emphasis on how ceramic materials have been utilized in medical device packaging, as well as how ceramic thin-film micromachining and processing may be further developed to create truly reliable, miniaturized, neural implants.

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“…Our group in Shenzhen Institutes of Advanced Technology (SIAT), Chinese Academy of Sciences (CAS) also adapted the hard packaging approach to host the retinal implant with more than 130 feedthroughs, but the microfabrication process was optimized in a different way. The packaging mainly consists of alumina/platinum (Al 2 O 3 /Pt) substrate, a Ti ring, and a Ti cap, which allows 100–500 feedthroughs in 1 cm 2 and shows the best cytotoxicity grade (Grade 0) [43]. As shown in Figure 2b, Pt vias were embedded in Al 2 O 3 sheets and covered with Pt pads for electric connection.…”

Section: Packaging and Integrationmentioning

confidence: 99%

Micro/Nano Technologies for High-Density Retinal Implant

et al. 2019

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During the past decades, there have been leaps in the development of micro/nano retinal implant technologies, which is one of the emerging applications in neural interfaces to restore vision. However, higher feedthroughs within a limited space are needed for more complex electronic systems and precise neural modulations. Active implantable medical electronics are required to have good electrical and mechanical properties, such as being small, light, and biocompatible, and with low power consumption and minimal immunological reactions during long-term implantation. For this purpose, high-density implantable packaging and flexible microelectrode arrays (fMEAs) as well as high-performance coating materials for retinal stimulation are crucial to achieve high resolution. In this review, we mainly focus on the considerations of the high-feedthrough encapsulation of implantable biomedical components to prolong working life, and fMEAs for different implant sites to deliver electrical stimulation to targeted retinal neuron cells. In addition, the functional electrode materials to achieve superior stimulation efficiency are also reviewed. The existing challenge and future research directions of micro/nano technologies for retinal implant are briefly discussed at the end of the review.

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Chronically Implantable Package Based on Alumina Ceramics and Titanium with High-density Feedthroughs for Medical Implants

Cited by 8 publications

References 14 publications

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices

Ceramic packaging in neural implants

Micro/Nano Technologies for High-Density Retinal Implant

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