“…Microelectromechanical systems (MEMS) accelerometers have been widely used in various application fields, such as consumer electronics, automobiles, medical, structural health monitoring, and inertial navigation [1,2,3,4]. According to the displacement or force transduction mechanisms, MEMS accelerometers can be categorized as different types, including piezoelectric [5,6], capacitive [7,8], piezoresistive [9,10], tunneling [11,12], resonant [13,14,15,16], optical [17,18], thermal [19,20], and electromagnetic [21,22] accelerometers. Capacitive transduction is one of the most commonly used technologies for high-performance MEMS accelerometers since it takes advantage of simple structure, low noise, low power consumption, cost-effectiveness, and reliability [4].…”