Classification of the amorphous film crystallization types with respect to structure and morphology features

Bagmut, A. G.

doi:10.1134/s1063785012050197

Cited by 19 publications

(2 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This is convenient because the crystallization and investigation of its results are carried out in a vacuum column of an electron microscope without extracting the sample into the air. For example, using electron beam crystallization, structural transformations were studied in a variety of amorphous stoichiometric oxides: ZrO 2 [1], Cr 2 O 3 [2], ReO 3 [2], Al 2 O 3 [3], Fe 2 O 3 [4], Ni 2 O 3 [5], HfO 2 [2,6]. However, there are no reports on electron-stimulated crystallization of amorphous non-stoichiometric oxides.…”

Section: Introductionmentioning

confidence: 99%

Comparative study of electron-beam crystallization of amorphous hafnium oxides HfO2 and HfOx (x = 1.82)

et al. 2020

View full text Add to dashboard Cite

The phase transformations of stoichiometric HfO 2 and non-stoichiometric HfO x oxides grown by ion-beam sputteringdeposition during their electron beam crystallization were investigated. It was found that the sequences of crystalline phase formations in stoichiometric and non-stoichiometric oxides are significantly different. An amorphous HfO 2 film crystallizes first to form monoclinic α-HfO 2 phase nanocrystals and then tetragonal β-HfO 2 phase nanocrystals. In nonstoichiometric HfO x oxides (x = 1.82), in contrast to HfO 2 oxides, hexagonal α-Hf phase metal clusters were initially present. During the crystallization process, the metallic α-Hf phase growth was observed first with the simultaneous appearance of the monoclinic α-HfO 2 phase. Then the orthorhombic-I γ-HfO 2 phase appeared, while the α-Hf phase growth ceased. The composition of the investigated non-stoichiometric HfO x oxides was chosen to be the same as in the dielectric layer of resistive memory cells (ReRAM). The crystallization of oxides was carried out in a local region, the sizes of which are comparable with the size of the ReRAM filament. This made it possible to partially project the crystallization results onto the forming and switching processes in ReRAM cells.

show abstract

Section: Introductionmentioning

confidence: 99%

Comparative study of electron-beam crystallization of amorphous hafnium oxides HfO2 and HfOx (x = 1.82)

et al. 2020

View full text Add to dashboard Cite

show abstract

“…Numerous 'in situ' electron microscopy studies have proved that polymorphic crystallization of thin amorphous films can be adequately described by phenomenological scheme that includes the following types (modes) of crystal growth in the amorphous matrix [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

‘In-Situ’ Electron Microscopy Video Registration of Thin Amorphous Films Crystallization

Bagmut¹

2020

Metallofiz. Noveishie Tekhnol.

View full text Add to dashboard Cite

The article summarizes the results of electron microscopic studies of 'in situ' crystallization of thin amorphous films. Data analysis is carried out based on the classification scheme of electron-beam crystallization of films, including structural-morphological and numerical characteristics. Layer polymorphous crystallization (as the analogue of Frank-van der Merwe growth mode), island polymorphous crystallization (as an analogue of the Volmer-Weber growth mode) and dendrite polymorphous crystallization (as an analogue of the Stransky-Krastanov growth mode) are identified. For each type of crystallization a dimensionless parameter of the relative length δ 0 is determined. It is equal to the ratio of the characteristic length to the value, related to the size of the unit cell of the crystal. Based on the electron microscopic video registration of the process, kinetic crystallization curves are built for each type of the transformation.

show abstract

Morphology and kinetics of crystals growth in amorphous films of Cr2O3, deposited by laser ablation

Bagmut

2018

Journal of Crystal Growth

View full text Add to dashboard Cite

Classification of the amorphous film crystallization types with respect to structure and morphology features

Cited by 19 publications

References 2 publications

Comparative study of electron-beam crystallization of amorphous hafnium oxides HfO2 and HfOx (x = 1.82)

Comparative study of electron-beam crystallization of amorphous hafnium oxides HfO2 and HfOx (x = 1.82)

‘In-Situ’ Electron Microscopy Video Registration of Thin Amorphous Films Crystallization

Morphology and kinetics of crystals growth in amorphous films of Cr2O3, deposited by laser ablation

Contact Info

Product

Resources

About