Cleanroom energy efficiency strategies: Modeling and simulation

Energy Efficiency in Manufacturing Systems

“…Simulation-based approaches are available to support the development of different measures (Chow, 1996;Andreassi et al, 2009;Wischhusen et al, 2003;Rebhan, 2002;Kircher et al, 2010). dimensioning, materials, usage of energy efficient components, detail design of tubes etc), an efficient process control (e.g.…”

“…This excludes pure mathematical (optimisation) models (e.g. Kircher et al, 2010;Wischhusen et al, 2003;Andreassi, 2009). agriculture Neumann, 1985, chemical/process engineering Mark et al, 2009).…”

Developing an innovative fan dry coil unit (FDCU) return system to improve energy efficiency of environmental control for mission critical cleanrooms

“…Since 1990s, the laminar flow cleanroom with product expose in cleanroom environment was replaced by using SMIF pod and mini-environment in a nonunidirectional cleanroom, the yield is significantly improved [18]. A cleanrooms with ISO Class 7 or less low cleanliness levels have adopted the ceiling-return arrangement, which presents fewer physical barriers and more construction flexibilities when compared with traditional wall-return arrangements especially for the cases in which locations of individual tools or layouts of production lines were to be changed from time to time [19]. Some literatures about the energy performances of cleanroom air-conditioning components such as FFU [20][21][22], make-up air (MAU) [23][24][25], chill water system [26,27] etc.…”

“…Due to a huge volume of recirculation air flow rate, a proper design on the air path can reduce airflow resistance and therefore increase the energy efficiency significantly [4]. Over the years, many, many articles addressed the opportunities to reduce energy [5][6][7][8] and construction cost [9][10][11]. A wall-return air recirculation system is traditionally used for ISO Class 6 through ISO Class 9 industrial cleanrooms [12], Class C and Class D pharmaceutical cleanrooms, and operation rooms in hospitals.…”

Various Energy-Saving Approaches to a TFT-LCD Panel Fab

“…Roulet et al [13] studied real heat recovery with air handling units and Bartholomew [14] investigated recovery of heat from make-up air from exhaust in labs, but neither reported energy-saving opportunities in cooling. Kircher et al [15] conducted a simulation and modeling of a 1600 m 2 university laboratory cleanroom in upstate New York using the TRNSYS model [16] with TMY2 weather data [17]. However, none of the above discussed energy efficiency of individual components of MAU.…”