Highlights Vibration suppression of cantilever beams used in AFMs and M/NEMS devices is studied The electrostatically actuated beam is subjected to Casimir and van der Waals forces Boundary feedback control law is adopted to exponentially stabilize a nonlinear PDE The strain gradient beam model is truncated using a nonlinear finite element method The controller increases pull-in voltage and extends the travel range of the actuator
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AbstractIn this paper, the vibration suppression of micro-or nano-scale cantilever beams used in M/NEMS devices is studied. The beam is subjected to some nonlinear distributed forces, namely electrostatics force with first order fringing field correction, Casimir, and van der Waals forces.For the sake of precision, the beam is modeled by strain gradient elasticity theory capable of predicting the size effects in mechanical behavior of small-scale flexible structures. Since the governing partial differential equation of motion is nonlinear, the linearization approach is adopted to tackle the control problem. A novel control law is proposed that guarantees the exponential stability of the linearized closed-loop system and also the local stability of original nonlinear closed-loop system. To prepare the model for computer simulations, the continuous model is truncated to a set of nonlinear ordinary differential equations by using Kantorovich method. Simulation results show that the proposed controller not only suppresses the forced vibration of the beam before crossing dynamic pull-in threshold, but also it extends the dynamic pull-in criterion.